Selective drive of electrostatic actuators using remote inductive powering

S. Takeuchi, N. Futai, I. Shimoyama

Research output: Contribution to conferencePaper

14 Citations (Scopus)

Abstract

A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.

Original languageEnglish
Pages574-577
Number of pages4
Publication statusPublished - 2001 Jan 1
Event14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland
Duration: 2001 Jan 212001 Jan 25

Conference

Conference14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
CountrySwitzerland
CityInterlaken
Period01/1/2101/1/25

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Takeuchi, S., Futai, N., & Shimoyama, I. (2001). Selective drive of electrostatic actuators using remote inductive powering. 574-577. Paper presented at 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland.