Abstract
A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Pages | 574-577 |
| Number of pages | 4 |
| Publication status | Published - 2001 |
| Externally published | Yes |
| Event | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken Duration: 2001 Jan 21 → 2001 Jan 25 |
Other
| Other | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) |
|---|---|
| City | Interlaken |
| Period | 01/1/21 → 01/1/25 |
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ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Selective drive of electrostatic actuators using remote inductive powering. / Takeuchi, S.; Futai, Nobuyuki; Shimoyama, I.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2001. p. 574-577.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Selective drive of electrostatic actuators using remote inductive powering
AU - Takeuchi, S.
AU - Futai, Nobuyuki
AU - Shimoyama, I.
PY - 2001
Y1 - 2001
N2 - A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.
AB - A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.
UR - http://www.scopus.com/inward/record.url?scp=0035010316&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035010316&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0035010316
SP - 574
EP - 577
BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
ER -