Abstract
A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.
| Original language | English |
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| Pages | 574-577 |
| Number of pages | 4 |
| Publication status | Published - 2001 Jan 1 |
| Event | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland Duration: 2001 Jan 21 → 2001 Jan 25 |
Conference
| Conference | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) |
|---|---|
| Country | Switzerland |
| City | Interlaken |
| Period | 01/1/21 → 01/1/25 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Takeuchi, S., Futai, N., & Shimoyama, I. (2001). Selective drive of electrostatic actuators using remote inductive powering. 574-577. Paper presented at 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland.