Selective drive of electrostatic actuators using remote inductive powering

S. Takeuchi; N. Futai; I. Shimoyama

Selective drive of electrostatic actuators using remote inductive powering

S. Takeuchi, N. Futai, I. Shimoyama

Research output: Contribution to conference › Paper › peer-review

Abstract

A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.

Original language	English
Pages	574-577
Number of pages	4
Publication status	Published - 2001 Jan 1
Externally published	Yes
Event	14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland Duration: 2001 Jan 21 → 2001 Jan 25

Conference

Conference	14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
Country	Switzerland
City	Interlaken
Period	01/1/21 → 01/1/25

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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Cite this

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abstract = "A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.",

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AU - Takeuchi, S.

AU - Futai, N.

AU - Shimoyama, I.

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N2 - A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.

AB - A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.

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T2 - 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)

Y2 - 21 January 2001 through 25 January 2001

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