Selective drive of electrostatic actuators using remote inductive powering

S. Takeuchi, Nobuyuki Futai, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages574-577
Number of pages4
Publication statusPublished - 2001
Externally publishedYes
Event14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken
Duration: 2001 Jan 212001 Jan 25

Other

Other14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
CityInterlaken
Period01/1/2101/1/25

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Takeuchi, S., Futai, N., & Shimoyama, I. (2001). Selective drive of electrostatic actuators using remote inductive powering. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 574-577)