Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

Hideki Yokoi, Y. Shoji, T. Mizumoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.

Original languageEnglish
Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages75-76
Number of pages2
ISBN (Print)078037830X, 9780780378308
DOIs
Publication statusPublished - 2003
Externally publishedYes
Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
Duration: 2003 Aug 182003 Aug 21

Other

Other2003 IEEE/LEOS International Conference on Optical MEMS
CountryUnited States
CityWaikoloa
Period03/8/1803/8/21

Fingerprint

Magnetooptical effects
Wet etching
Waveguides
Oxidation
Phase shift
Semiconductor materials

Keywords

  • Electromagnetic waveguides
  • Isolators
  • Magnetooptic effects
  • Optical interferometry
  • Optical refraction
  • Optical surface waves
  • Optical variables control
  • Optical waveguides
  • Oxidation
  • Wet etching

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yokoi, H., Shoji, Y., & Mizumoto, T. (2003). Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 75-76). [1233474] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233474

Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide. / Yokoi, Hideki; Shoji, Y.; Mizumoto, T.

2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. p. 75-76 1233474.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yokoi, H, Shoji, Y & Mizumoto, T 2003, Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233474, Institute of Electrical and Electronics Engineers Inc., pp. 75-76, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 03/8/18. https://doi.org/10.1109/OMEMS.2003.1233474
Yokoi H, Shoji Y, Mizumoto T. Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide. In 2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc. 2003. p. 75-76. 1233474 https://doi.org/10.1109/OMEMS.2003.1233474
Yokoi, Hideki ; Shoji, Y. ; Mizumoto, T. / Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide. 2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 75-76
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keywords = "Electromagnetic waveguides, Isolators, Magnetooptic effects, Optical interferometry, Optical refraction, Optical surface waves, Optical variables control, Optical waveguides, Oxidation, Wet etching",
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