Silicalite Membranes Modified by Counterdiffusion CVD Technique

Mikihiro Nomura, Takeo Yamaguchi, Shin Ichi Nakao

Research output: Contribution to journalArticle

112 Citations (Scopus)

Abstract

A new technique to modify the zeolite molecular sieve membrane has been developed. Zeolite membranes have polycrystalline structure, and penetrant molecules can transport through zeolite crystals and among crystal faces. When the intercrystalline region are plugged, the zeolite crystal pores are the only pathway for membrane transport. That is a promising way to obtain a good molecular sieving effect. Counterdiffusion CVD technique was carried out to fill the intercrystalline region. Tetraethyl orthosilicate (TEOS) was employed as a silica source, and O3 was used as an oxidizing agent; these reactants form amorphous silica by CVD reaction. TEOS hardly penetrated into zeolitic pores because of its molecular size, and zeolitic pores may not have been changed by the reaction. Thus, only the intercrystalline region was filled due to the silica formation. The CVD-modified silicalite membrane produced a n-butane selectivity of 87.8 over isobutane at 288 K.

Original languageEnglish
Pages (from-to)4217-4223
Number of pages7
JournalIndustrial and Engineering Chemistry Research
Volume36
Issue number10
Publication statusPublished - 1997
Externally publishedYes

Fingerprint

Zeolites
zeolite
Chemical vapor deposition
orthosilicate
Silicon Dioxide
membrane
Membranes
silica
Silica
crystal
Crystals
Butanes
sieving
Molecular sieves
Butane
Oxidants
Molecules
tetraethoxysilane

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Environmental Science(all)
  • Polymers and Plastics

Cite this

Silicalite Membranes Modified by Counterdiffusion CVD Technique. / Nomura, Mikihiro; Yamaguchi, Takeo; Nakao, Shin Ichi.

In: Industrial and Engineering Chemistry Research, Vol. 36, No. 10, 1997, p. 4217-4223.

Research output: Contribution to journalArticle

Nomura, Mikihiro ; Yamaguchi, Takeo ; Nakao, Shin Ichi. / Silicalite Membranes Modified by Counterdiffusion CVD Technique. In: Industrial and Engineering Chemistry Research. 1997 ; Vol. 36, No. 10. pp. 4217-4223.
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