Abstract
Photonic crystal structures consisting of dielectric cylinders arranged in a honeycomb pattern were fabricated in silicon using electron-beam lithography and inductively-coupled plasma dry-etching. Lattice parameters of the fabricated structures (rod diameter ∼0.4 μm, distance between the centers of neighboring rods ∼0.85 μm, and rod height ∼5.2 μm) allowed to achieve and confirm experimentally the complete photonic band gap in vicinity of the optical communications wavelengths around 1.5 μm.
Original language | English |
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Pages (from-to) | 6934-6936 |
Number of pages | 3 |
Journal | Journal of Applied Physics |
Volume | 96 |
Issue number | 11 |
DOIs | |
Publication status | Published - 2004 Dec 1 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy(all)