SIMS study of SiC single crystal oxidized in atmosphere containing isotopic water vapor

Takaya Akashi, Miho Kasajima, Hajime Kiyono, Shiro Shimada

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Double oxidation of SiC single crystal was carried out in oxidizing gas (O2 or H2O) at 1673 K first and then in isotopic water (H2 18O or D2O) at 1473 K or 1573 K to trace diffusing species during oxidation at high temperatures. SIMS analysis revealed that deuterium was enriched near SiO2/SiC interface when SiC was oxidized in Ar/D2O gas mixture at the second oxidation step, indicating that water molecules or hydroxyls diffused in SiO2 layer to the SiO2/SiC interface. Large amount of carbon in SiO2 scale near the SiO2/SiC interface after oxidation in dry Ar/O 2 gas mixture suggests a possibility that outward diffusion of carbonaceous species can be rate-controlling step during oxidation in dry Ar/O2 atmosphere. Decrease in the amount of the carbon with oxidation time in Ar/H2 18O gas mixture at the second oxidation step implies that the outward diffusion of carbon-aceous species in SiO2 scale was promoted during oxidation in atmosphere containing water vapor.

Original languageEnglish
Pages (from-to)960-964
Number of pages5
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume116
Issue number1357
Publication statusPublished - 2008 Sep
Externally publishedYes

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Steam
Secondary ion mass spectrometry
Water vapor
secondary ion mass spectrometry
water vapor
Single crystals
atmospheres
Oxidation
oxidation
single crystals
Gas mixtures
gas mixtures
Carbon
carbon
Water
Deuterium
Hydroxyl Radical
water
deuterium
Gases

Keywords

  • Diffusion
  • Isotope
  • Oxidation
  • Silica
  • Silicon carbide
  • SIMS
  • Water

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

SIMS study of SiC single crystal oxidized in atmosphere containing isotopic water vapor. / Akashi, Takaya; Kasajima, Miho; Kiyono, Hajime; Shimada, Shiro.

In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, Vol. 116, No. 1357, 09.2008, p. 960-964.

Research output: Contribution to journalArticle

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