Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering

W. Chen, Y. Rao, G. Fujita

Research output: Contribution to journal › Article

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2006 Aug 1

Cite this

Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering. / Chen, W.; Rao, Y.; Fujita, G.

In: Default journal, 01.08.2006.

Research output: Contribution to journal › Article

Chen, W, Rao, Y & Fujita, G 2006, 'Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering', Default journal.
Chen W, Rao Y, Fujita G. Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering. Default journal. 2006 Aug 1.
Chen, W. ; Rao, Y. ; Fujita, G. / Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering. In: Default journal. 2006.
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