Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering

W. Chen, Y. Rao, G. Fujita

Regional Environment Systems

Research output: Contribution to journal › Article

Original language	English
Journal	Default journal
Publication status	Published - 2006 Aug 1

Cite this

Chen, W., Rao, Y., & Fujita, G. (2006). Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering. Default journal.