Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering

W. Chen, Y. Rao, G. Fujita

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2006 Aug 1

Cite this

Simulation and Experimental Researches on Medium-Frequency Power Supply for Magnetron Sputtering. / Chen, W.; Rao, Y.; Fujita, G.

In: Default journal, 01.08.2006.

Research output: Contribution to journalArticle

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AU - Chen, W.

AU - Rao, Y.

AU - Fujita, G.

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M3 - Article

JO - Default journal

JF - Default journal

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