Abstract
A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Pages | 206-209 |
| Number of pages | 4 |
| Publication status | Published - 2003 |
| Externally published | Yes |
| Event | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto Duration: 2003 Jan 19 → 2003 Jan 23 |
Other
| Other | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
|---|---|
| City | Kyoto |
| Period | 03/1/19 → 03/1/23 |
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ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering
Cite this
Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. / Futai, Nobuyuki; Matsumoto, Kiyoshi; Shimoyama, Isao.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 206-209.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS
AU - Futai, Nobuyuki
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2003
Y1 - 2003
N2 - A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.
AB - A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.
UR - http://www.scopus.com/inward/record.url?scp=0037818316&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0037818316&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0037818316
SP - 206
EP - 209
BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
ER -