Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS

Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages206-209
Number of pages4
Publication statusPublished - 2003
Externally publishedYes
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto
Duration: 2003 Jan 192003 Jan 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CityKyoto
Period03/1/1903/1/23

Fingerprint

Inductance
Skin
Durability
Fabrication
Sensors

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Futai, N., Matsumoto, K., & Shimoyama, I. (2003). Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 206-209)

Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. / Futai, Nobuyuki; Matsumoto, Kiyoshi; Shimoyama, Isao.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 206-209.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Futai, N, Matsumoto, K & Shimoyama, I 2003, Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). pp. 206-209, IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, 03/1/19.
Futai N, Matsumoto K, Shimoyama I. Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 206-209
Futai, Nobuyuki ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. pp. 206-209
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