Abstract
A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.
| Original language | English |
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| Pages | 206-209 |
| Number of pages | 4 |
| Publication status | Published - 2003 Jul 23 |
| Event | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: 2003 Jan 19 → 2003 Jan 23 |
Conference
| Conference | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
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| Country | Japan |
| City | Kyoto |
| Period | 03/1/19 → 03/1/23 |
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ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
Futai, N., Matsumoto, K., & Shimoyama, I. (2003). Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. 206-209. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.