Simultaneous epitaxial growth of anatase and rutile TiO₂ thin films by RF helicon magnetron sputtering

Engineering & Materials Science

• Helicons 100%
• Epitaxial growth 75%
• Magnetron sputtering 71%
• Titanium dioxide 69%
• Thin films 50%
• Epitaxial films 48%
• Sapphire 28%
• Refractive index 28%
• Transmission electron microscopy 21%
• Spectroscopic ellipsometry 19%
• Film growth 16%
• Crystal lattices 16%
• Lattice constants 15%
• Electron diffraction 14%
• Sputtering 13%
• Crystalline materials 11%
• X ray diffraction 10%
• Wavelength 9%
• Poles 9%
• Textures 8%
• Substrates 7%

Chemical Compounds

• Epitaxial Growth 65%
• Magnetron Sputtering 61%
• Rutile 52%
• Epitaxial Film 45%
• Titanium Dioxide 44%
• Liquid Film 25%
• Refractive Index 20%
• Lattice Constant 11%
• Ellipsometry 11%
• Sputtering 11%
• Electron Diffraction 10%
• Crystalline Texture 10%
• Wavelength 7%
• Transmission Electron Microscopy 7%
• X-Ray Diffraction 5%

Physics & Astronomy

• anatase 57%
• rutile 56%
• magnetron sputtering 44%
• thin films 27%
• sapphire 11%
• refractivity 9%
• transmission electron microscopy 8%
• ellipsometry 6%
• poles 5%
• electron diffraction 5%
• textures 5%
• plots 5%
• sputtering 5%
• atmospheres 4%
• diffraction 3%
• wavelengths 3%
• x rays 3%