Simultaneous epitaxial growth of anatase and rutile TiO2 thin films by RF helicon magnetron sputtering

Lei Miao, Sakae Tanemura, Ping Jin, Kenji Kaneko, Asuka Terai, Nataliya Nabatova-Gabain

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Simultaneous epitaxial growth of anatase and rutile TiO<sub>2</sub> thin films by RF helicon magnetron sputtering'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy