Site Control of Tunnel Etching of Al for Electrolytic Capacitors Using Pretexturing by Mold

Hideki Masuda, Toshiki Tajima, Kazuyuki Nishio

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1150-1151
JournalChemistry Letters
Volume31
Publication statusPublished - 2002 Nov 5

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