SMA micro pump chip to flow liquids and gases

Koji Ikuta, Tadahiro Hasegawa, Takao Adachi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes SMA micro pump chip with high performance. This chip can flow not only liquids but also gases (12μl/min., 25kPa for water, 11μl/min., 5kPa for air). Moreover, the micro pump is tolerant of gas bubbles in the liquid chamber and it is possible to prime by itself. To achieve this performance, the micro pump improved three elements. The first one is eliminating pressure loss of the check valves. The second one is optimizing flow pattern inside the deformable chamber. And the third one is increasing compressibility of the deformable chamber. The micro pump chip was fabricated using our original method of hybrid micro stereo lithography (hybrid-IH process). Therefore, their packaging without leakage was made successfully.

Original languageEnglish
Title of host publicationSMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies
Pages343-350
Number of pages8
DOIs
Publication statusPublished - 2008
Externally publishedYes
EventInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007 - Tsukuba
Duration: 2007 Dec 22007 Dec 5

Other

OtherInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007
CityTsukuba
Period07/12/207/12/5

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ASJC Scopus subject areas

  • Mechanics of Materials

Cite this

Ikuta, K., Hasegawa, T., & Adachi, T. (2008). SMA micro pump chip to flow liquids and gases. In SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies (pp. 343-350) https://doi.org/10.1361/cp2007sms343