Sma micro switching valve chip for biochemical ic family

Koji Ikuta, Tadahiro Hasegawa, Takao Adachi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the development of the micro switching valve chip, which are actuated by SMA micro actuator. This micro switching valve uses only one built-in SMA micro actuator to switch among two outlets. The switching time at the active phase was faster than 0.5 sec. All parts such as the silicone rubber, the SMA micro actuator and a spacer were inserted during the fabrication of the switching valve using our original method of hybrid micro stereo lithography, thereby eliminating the need for micro assembly and bonding. In addition, basic performance of the switching valve chip was verified experimentally, using simple total reactor system which was constructed by stacking up the switching valve chip and other biochemical IC chips.

Original languageEnglish
Title of host publicationSMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies
Pages351-358
Number of pages8
DOIs
Publication statusPublished - 2008 Dec 1
Externally publishedYes
EventInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007 - Tsukuba, Japan
Duration: 2007 Dec 22007 Dec 5

Publication series

NameSMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies

Conference

ConferenceInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007
CountryJapan
CityTsukuba
Period07/12/207/12/5

ASJC Scopus subject areas

  • Mechanics of Materials

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  • Cite this

    Ikuta, K., Hasegawa, T., & Adachi, T. (2008). Sma micro switching valve chip for biochemical ic family. In SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies (pp. 351-358). (SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies). https://doi.org/10.1361/cp2007smst351