Sma micro switching valve chip for biochemical ic family

Koji Ikuta, Tadahiro Hasegawa, Takao Adachi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the development of the micro switching valve chip, which are actuated by SMA micro actuator. This micro switching valve uses only one built-in SMA micro actuator to switch among two outlets. The switching time at the active phase was faster than 0.5 sec. All parts such as the silicone rubber, the SMA micro actuator and a spacer were inserted during the fabrication of the switching valve using our original method of hybrid micro stereo lithography, thereby eliminating the need for micro assembly and bonding. In addition, basic performance of the switching valve chip was verified experimentally, using simple total reactor system which was constructed by stacking up the switching valve chip and other biochemical IC chips.

Original languageEnglish
Title of host publicationSMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies
Pages351-358
Number of pages8
DOIs
Publication statusPublished - 2008
Externally publishedYes
EventInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007 - Tsukuba
Duration: 2007 Dec 22007 Dec 5

Other

OtherInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007
CityTsukuba
Period07/12/207/12/5

Fingerprint

Actuators
Silicones
Lithography
Rubber
Switches
Fabrication

ASJC Scopus subject areas

  • Mechanics of Materials

Cite this

Ikuta, K., Hasegawa, T., & Adachi, T. (2008). Sma micro switching valve chip for biochemical ic family. In SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies (pp. 351-358) https://doi.org/10.1361/cp2007smst351

Sma micro switching valve chip for biochemical ic family. / Ikuta, Koji; Hasegawa, Tadahiro; Adachi, Takao.

SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies. 2008. p. 351-358.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ikuta, K, Hasegawa, T & Adachi, T 2008, Sma micro switching valve chip for biochemical ic family. in SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies. pp. 351-358, International Conference on Shape Memory and Superelastic Technologies, SMST-2007, Tsukuba, 07/12/2. https://doi.org/10.1361/cp2007smst351
Ikuta K, Hasegawa T, Adachi T. Sma micro switching valve chip for biochemical ic family. In SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies. 2008. p. 351-358 https://doi.org/10.1361/cp2007smst351
Ikuta, Koji ; Hasegawa, Tadahiro ; Adachi, Takao. / Sma micro switching valve chip for biochemical ic family. SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies. 2008. pp. 351-358
@inproceedings{e54dde65b46a42d3ab9cb12eec9f2e56,
title = "Sma micro switching valve chip for biochemical ic family",
abstract = "This paper describes the development of the micro switching valve chip, which are actuated by SMA micro actuator. This micro switching valve uses only one built-in SMA micro actuator to switch among two outlets. The switching time at the active phase was faster than 0.5 sec. All parts such as the silicone rubber, the SMA micro actuator and a spacer were inserted during the fabrication of the switching valve using our original method of hybrid micro stereo lithography, thereby eliminating the need for micro assembly and bonding. In addition, basic performance of the switching valve chip was verified experimentally, using simple total reactor system which was constructed by stacking up the switching valve chip and other biochemical IC chips.",
author = "Koji Ikuta and Tadahiro Hasegawa and Takao Adachi",
year = "2008",
doi = "10.1361/cp2007smst351",
language = "English",
isbn = "9780871707222",
pages = "351--358",
booktitle = "SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies",

}

TY - GEN

T1 - Sma micro switching valve chip for biochemical ic family

AU - Ikuta, Koji

AU - Hasegawa, Tadahiro

AU - Adachi, Takao

PY - 2008

Y1 - 2008

N2 - This paper describes the development of the micro switching valve chip, which are actuated by SMA micro actuator. This micro switching valve uses only one built-in SMA micro actuator to switch among two outlets. The switching time at the active phase was faster than 0.5 sec. All parts such as the silicone rubber, the SMA micro actuator and a spacer were inserted during the fabrication of the switching valve using our original method of hybrid micro stereo lithography, thereby eliminating the need for micro assembly and bonding. In addition, basic performance of the switching valve chip was verified experimentally, using simple total reactor system which was constructed by stacking up the switching valve chip and other biochemical IC chips.

AB - This paper describes the development of the micro switching valve chip, which are actuated by SMA micro actuator. This micro switching valve uses only one built-in SMA micro actuator to switch among two outlets. The switching time at the active phase was faster than 0.5 sec. All parts such as the silicone rubber, the SMA micro actuator and a spacer were inserted during the fabrication of the switching valve using our original method of hybrid micro stereo lithography, thereby eliminating the need for micro assembly and bonding. In addition, basic performance of the switching valve chip was verified experimentally, using simple total reactor system which was constructed by stacking up the switching valve chip and other biochemical IC chips.

UR - http://www.scopus.com/inward/record.url?scp=65649142208&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65649142208&partnerID=8YFLogxK

U2 - 10.1361/cp2007smst351

DO - 10.1361/cp2007smst351

M3 - Conference contribution

SN - 9780871707222

SP - 351

EP - 358

BT - SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies

ER -