Spectroscopic ellipsometry analysis of multilayered TiO2-Ag thin films for photochromic application

L. Miao, T. Jiang, S. Tanemura, M. Tanemura, N. Nabatova-Gabain, G. Xu

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


By altering the surrounding media of metal particles, the wavelength of surface plasma resonance can be tailored, which offers the potential for utilizing of plasma resonance related phenomenon, such as photochromism. Both sandwiched (TiO2/Ag/TiO2) and overcoated (TiO 2/Ag) films with different thicknesses were deposited on quartz substrate by rf helicon magnetron sputtering method. The structure of multi-layered TiO2-Ag films and the concentration of loaded metal Ag in each layer were determined by spectroscopic ellipsometry in high accuracy. The spectral dependent dielectric functions of each layer were obtained, which exhibited typical semiconductor TiO2, metal Ag and mixture TiO 2-Ag behaviors, respectively. The surface plasma resonance peak was observed for several extremely thin mixture layers. The apparent redshift of SPR peak from 700 nm to 780 nm was happened with increasing of Ag amount from 35% to 50%. The broadening of SPR peak was found for layer 3 in sample 1 with low concentration Ag embedded in TiO2 media.

Original languageEnglish
Pages (from-to)1125-1128
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue number5
Publication statusPublished - 2008
Externally publishedYes
Event4th International Conference on Spectroscopic Ellipsometry, ICSE4 - Stockholm, Sweden
Duration: 2007 Jun 112007 Jun 15

ASJC Scopus subject areas

  • Condensed Matter Physics


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