Spectroscopic ellipsometry study on TiO                         2                          thin films modified by N                         2                         -H                         2                          plasma surface treatment

S. Tanemura; L. Miao; H. Watanabe; Y. Mori

doi:10.1016/j.apsusc.2004.10.116

Spectroscopic ellipsometry study on TiO ₂ thin films modified by N ₂ -H ₂ plasma surface treatment

S. Tanemura, L. Miao, H. Watanabe, Y. Mori

Research output: Contribution to journal › Conference article

6 Citations (Scopus)

Abstract

We analyzed successfully the refractive index, n, and extinction coefficient, k, of three samples such as as-deposited single-phase anatase-TiO ₂ polycrystalline thin films on slide glass substrates (#1), the sample surface-treated by N ₂ -H ₂ mixed-gases plasma (#2), and the sample being additionally anneal-treated in N ₂ gases (#3), by spectroscopic ellipsometry (SE). The double-layered film configuration named as the surface and the bulk layers is employed in SE analysis. The optical properties of the surface layer are confirmed to be important to explain the significant red shift of the absorption edge of both surface-treated samples observed in the preceding report. Particularly, the obtained imaginary part of complex dielectric constant of the surface layer of the samples #2 and #3 shows significant difference from that of the sample #1. This is due to the absorptive transitions not by solely anatase-TiO ₂ but by mixed formation of TiO _2-x N _x and TiN with metallic characteristics.

Original language	English
Pages (from-to)	546-549
Number of pages	4
Journal	Applied Surface Science
Volume	244
Issue number	1-4
DOIs	https://doi.org/10.1016/j.apsusc.2004.10.116
Publication status	Published - 2005 May 15
Externally published	Yes
Event	12th International Conference on Solid Films and Surfaces - Hammatsu, Japan Duration: 2004 Jun 21 → 2004 Jun 25

Keywords

Complex dielectric constant
Complex refractive index
SE
Thin film
TiO

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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Tanemura, S., Miao, L., Watanabe, H., & Mori, Y. (2005). Spectroscopic ellipsometry study on TiO ₂ thin films modified by N ₂ -H ₂ plasma surface treatment Applied Surface Science, 244(1-4), 546-549. https://doi.org/10.1016/j.apsusc.2004.10.116

Spectroscopic ellipsometry study on TiO ₂ thin films modified by N ₂ -H ₂ plasma surface treatment . / Tanemura, S.; Miao, L.; Watanabe, H.; Mori, Y.

In: Applied Surface Science, Vol. 244, No. 1-4, 15.05.2005, p. 546-549.

Research output: Contribution to journal › Conference article

Tanemura, S, Miao, L, Watanabe, H & Mori, Y 2005, ' Spectroscopic ellipsometry study on TiO ₂ thin films modified by N ₂ -H ₂ plasma surface treatment ', Applied Surface Science, vol. 244, no. 1-4, pp. 546-549. https://doi.org/10.1016/j.apsusc.2004.10.116

Tanemura S, Miao L, Watanabe H, Mori Y. Spectroscopic ellipsometry study on TiO ₂ thin films modified by N ₂ -H ₂ plasma surface treatment Applied Surface Science. 2005 May 15;244(1-4):546-549. https://doi.org/10.1016/j.apsusc.2004.10.116

Tanemura, S. ; Miao, L. ; Watanabe, H. ; Mori, Y. / Spectroscopic ellipsometry study on TiO ₂ thin films modified by N ₂ -H ₂ plasma surface treatment In: Applied Surface Science. 2005 ; Vol. 244, No. 1-4. pp. 546-549.

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abstract = " We analyzed successfully the refractive index, n, and extinction coefficient, k, of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (#1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (#2), and the sample being additionally anneal-treated in N 2 gases (#3), by spectroscopic ellipsometry (SE). The double-layered film configuration named as the surface and the bulk layers is employed in SE analysis. The optical properties of the surface layer are confirmed to be important to explain the significant red shift of the absorption edge of both surface-treated samples observed in the preceding report. Particularly, the obtained imaginary part of complex dielectric constant of the surface layer of the samples #2 and #3 shows significant difference from that of the sample #1. This is due to the absorptive transitions not by solely anatase-TiO 2 but by mixed formation of TiO 2-x N x and TiN with metallic characteristics.",

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N2 - We analyzed successfully the refractive index, n, and extinction coefficient, k, of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (#1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (#2), and the sample being additionally anneal-treated in N 2 gases (#3), by spectroscopic ellipsometry (SE). The double-layered film configuration named as the surface and the bulk layers is employed in SE analysis. The optical properties of the surface layer are confirmed to be important to explain the significant red shift of the absorption edge of both surface-treated samples observed in the preceding report. Particularly, the obtained imaginary part of complex dielectric constant of the surface layer of the samples #2 and #3 shows significant difference from that of the sample #1. This is due to the absorptive transitions not by solely anatase-TiO 2 but by mixed formation of TiO 2-x N x and TiN with metallic characteristics.

AB - We analyzed successfully the refractive index, n, and extinction coefficient, k, of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (#1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (#2), and the sample being additionally anneal-treated in N 2 gases (#3), by spectroscopic ellipsometry (SE). The double-layered film configuration named as the surface and the bulk layers is employed in SE analysis. The optical properties of the surface layer are confirmed to be important to explain the significant red shift of the absorption edge of both surface-treated samples observed in the preceding report. Particularly, the obtained imaginary part of complex dielectric constant of the surface layer of the samples #2 and #3 shows significant difference from that of the sample #1. This is due to the absorptive transitions not by solely anatase-TiO 2 but by mixed formation of TiO 2-x N x and TiN with metallic characteristics.

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