TY - JOUR
T1 - Spectroscopic ellipsometry study on TiO 2 thin films modified by N 2 -H 2 plasma surface treatment
AU - Tanemura, S.
AU - Miao, L.
AU - Watanabe, H.
AU - Mori, Y.
N1 - Funding Information:
This work is partly supported by grants from both the NITECH 21st Century COE program for “World Ceramics Center for Environmental Harmony” and the Tokai Foundation, Japan. A part of this work is supported by “Nanotechnology Support Project” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan.
Copyright:
Copyright 2019 Elsevier B.V., All rights reserved.
PY - 2005/5/15
Y1 - 2005/5/15
N2 - We analyzed successfully the refractive index, n, and extinction coefficient, k, of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (#1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (#2), and the sample being additionally anneal-treated in N 2 gases (#3), by spectroscopic ellipsometry (SE). The double-layered film configuration named as the surface and the bulk layers is employed in SE analysis. The optical properties of the surface layer are confirmed to be important to explain the significant red shift of the absorption edge of both surface-treated samples observed in the preceding report. Particularly, the obtained imaginary part of complex dielectric constant of the surface layer of the samples #2 and #3 shows significant difference from that of the sample #1. This is due to the absorptive transitions not by solely anatase-TiO 2 but by mixed formation of TiO 2-x N x and TiN with metallic characteristics.
AB - We analyzed successfully the refractive index, n, and extinction coefficient, k, of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (#1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (#2), and the sample being additionally anneal-treated in N 2 gases (#3), by spectroscopic ellipsometry (SE). The double-layered film configuration named as the surface and the bulk layers is employed in SE analysis. The optical properties of the surface layer are confirmed to be important to explain the significant red shift of the absorption edge of both surface-treated samples observed in the preceding report. Particularly, the obtained imaginary part of complex dielectric constant of the surface layer of the samples #2 and #3 shows significant difference from that of the sample #1. This is due to the absorptive transitions not by solely anatase-TiO 2 but by mixed formation of TiO 2-x N x and TiN with metallic characteristics.
KW - Complex dielectric constant
KW - Complex refractive index
KW - SE
KW - Thin film
KW - TiO
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U2 - 10.1016/j.apsusc.2004.10.116
DO - 10.1016/j.apsusc.2004.10.116
M3 - Conference article
AN - SCOPUS:15844413400
VL - 244
SP - 546
EP - 549
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - 1-4
T2 - 12th International Conference on Solid Films and Surfaces
Y2 - 21 June 2004 through 25 June 2004
ER -