Spectroscopic ellipsometry study on TiO 2 thin films modified by N 2 -H 2 plasma surface treatment

S. Tanemura, L. Miao, H. Watanabe, Y. Mori

Research output: Contribution to journalConference article

6 Citations (Scopus)

Abstract

We analyzed successfully the refractive index, n, and extinction coefficient, k, of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (#1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (#2), and the sample being additionally anneal-treated in N 2 gases (#3), by spectroscopic ellipsometry (SE). The double-layered film configuration named as the surface and the bulk layers is employed in SE analysis. The optical properties of the surface layer are confirmed to be important to explain the significant red shift of the absorption edge of both surface-treated samples observed in the preceding report. Particularly, the obtained imaginary part of complex dielectric constant of the surface layer of the samples #2 and #3 shows significant difference from that of the sample #1. This is due to the absorptive transitions not by solely anatase-TiO 2 but by mixed formation of TiO 2-x N x and TiN with metallic characteristics.

Original languageEnglish
Pages (from-to)546-549
Number of pages4
JournalApplied Surface Science
Volume244
Issue number1-4
DOIs
Publication statusPublished - 2005 May 15
Externally publishedYes
Event12th International Conference on Solid Films and Surfaces - Hammatsu, Japan
Duration: 2004 Jun 212004 Jun 25

Keywords

  • Complex dielectric constant
  • Complex refractive index
  • SE
  • Thin film
  • TiO

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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