Sputter-Deposited Si layer for optical isolator with si guiding layer

Hideki Yokoi, Keigo Sasaki, Takayoshi Aiba

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

An optical isolator with a Si guiding layer that makes use of a nonreciprocal phase shift is discussed. The Si guiding layer was sputterdeposited on a garnet substrate. The magnetooptic waveguide in the optical isolator had an air/Si/magnetic garnet structure. The Si layer deposited on the garnet substrate was analyzed by spectroscopic ellipsometry and X-ray diffraction. A rib waveguide was fabricated on the deposited Si layer and evaluated. The nonreciprocal phase shift in the magnetooptic waveguide was calculated at a wavelength of 1.55 mm. The required thickness of the magnetic-garnet cladding layer was obtained by calculating the nonreciprocal phase shift.

Original languageEnglish
Article number062202
JournalJapanese Journal of Applied Physics
Volume48
Issue number6
DOIs
Publication statusPublished - 2009 Jun

Fingerprint

isolators
Garnets
garnets
Phase shift
Magnetooptical effects
Waveguides
phase shift
waveguides
Spectroscopic ellipsometry
Substrates
ellipsometry
X ray diffraction
Wavelength
Air
air
diffraction
wavelengths
x rays

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Sputter-Deposited Si layer for optical isolator with si guiding layer. / Yokoi, Hideki; Sasaki, Keigo; Aiba, Takayoshi.

In: Japanese Journal of Applied Physics, Vol. 48, No. 6, 062202, 06.2009.

Research output: Contribution to journalArticle

@article{5bb46a52f7994deeaaeddd0f7b28d00b,
title = "Sputter-Deposited Si layer for optical isolator with si guiding layer",
abstract = "An optical isolator with a Si guiding layer that makes use of a nonreciprocal phase shift is discussed. The Si guiding layer was sputterdeposited on a garnet substrate. The magnetooptic waveguide in the optical isolator had an air/Si/magnetic garnet structure. The Si layer deposited on the garnet substrate was analyzed by spectroscopic ellipsometry and X-ray diffraction. A rib waveguide was fabricated on the deposited Si layer and evaluated. The nonreciprocal phase shift in the magnetooptic waveguide was calculated at a wavelength of 1.55 mm. The required thickness of the magnetic-garnet cladding layer was obtained by calculating the nonreciprocal phase shift.",
author = "Hideki Yokoi and Keigo Sasaki and Takayoshi Aiba",
year = "2009",
month = "6",
doi = "10.1143/JJAP.48.062202",
language = "English",
volume = "48",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "6",

}

TY - JOUR

T1 - Sputter-Deposited Si layer for optical isolator with si guiding layer

AU - Yokoi, Hideki

AU - Sasaki, Keigo

AU - Aiba, Takayoshi

PY - 2009/6

Y1 - 2009/6

N2 - An optical isolator with a Si guiding layer that makes use of a nonreciprocal phase shift is discussed. The Si guiding layer was sputterdeposited on a garnet substrate. The magnetooptic waveguide in the optical isolator had an air/Si/magnetic garnet structure. The Si layer deposited on the garnet substrate was analyzed by spectroscopic ellipsometry and X-ray diffraction. A rib waveguide was fabricated on the deposited Si layer and evaluated. The nonreciprocal phase shift in the magnetooptic waveguide was calculated at a wavelength of 1.55 mm. The required thickness of the magnetic-garnet cladding layer was obtained by calculating the nonreciprocal phase shift.

AB - An optical isolator with a Si guiding layer that makes use of a nonreciprocal phase shift is discussed. The Si guiding layer was sputterdeposited on a garnet substrate. The magnetooptic waveguide in the optical isolator had an air/Si/magnetic garnet structure. The Si layer deposited on the garnet substrate was analyzed by spectroscopic ellipsometry and X-ray diffraction. A rib waveguide was fabricated on the deposited Si layer and evaluated. The nonreciprocal phase shift in the magnetooptic waveguide was calculated at a wavelength of 1.55 mm. The required thickness of the magnetic-garnet cladding layer was obtained by calculating the nonreciprocal phase shift.

UR - http://www.scopus.com/inward/record.url?scp=68649087904&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=68649087904&partnerID=8YFLogxK

U2 - 10.1143/JJAP.48.062202

DO - 10.1143/JJAP.48.062202

M3 - Article

VL - 48

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 6

M1 - 062202

ER -