Sputter Deposition and Characterization of Sm-Doped Pb(Mg1/3, Nb2/3)O-PbTiO Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application

Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

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