Sputter deposition of YSZ epitaxial buffer layer at wafer level for piezoelectric MEMS utilizing PZT-based monocrystalline thin film

Shinsuke Nishizawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

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Engineering & Materials Science