Stability of a new polyimide siloxane film as interlayer dielectrics of ULSI multilevel interconnections

T. Homma, Y. Kutsuzawa, K. Kunimune, Y. Murao

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Stability of a new polyimide siloxane film as interlayer dielectrics of ULSI multilevel interconnections'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science