Stable Observation of the Evolution of Leakage Spots in HfO2/SiO2 stacked structures

K. Kyuno, K. Kita, A. Toriumi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)788-789
JournalExtended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)
Publication statusPublished - 2004 Sep 1

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