Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

Saulius Juodkazis; Makoto Horyama; Masafumi Miwa; Mitsuru Watanabe; Andrius Marcinkevičius; Vygantas Mizeikis; Shigeki Matsuo; Hiroaki Misawa

doi:10.1117/12.464145

Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

Saulius Juodkazis, Makoto Horyama, Masafumi Miwa, Mitsuru Watanabe, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Citations (Scopus)

Abstract

We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Editors	V.Y. Panchenko, V.S. Golubev
Pages	27-38
Number of pages	12
Volume	4644
DOIs	https://doi.org/10.1117/12.464145
Publication status	Published - 2002
Externally published	Yes
Event	Seventh International Conference on Laser and Laser-Information Technologies - Suzdal, Russian Federation Duration: 2001 Jun 20 → 2001 Jun 26

Other

Other	Seventh International Conference on Laser and Laser-Information Technologies
Country	Russian Federation
City	Suzdal
Period	01/6/20 → 01/6/26

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Keywords

Defects
Direct laser writing
Light-induced damage threshold
Photopolymerization
Silica
Time-resolved measurements

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

Cite this

Juodkazis, S., Horyama, M., Miwa, M., Watanabe, M., Marcinkevičius, A., Mizeikis, V., ... Misawa, H. (2002). Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. In V. Y. Panchenko, & V. S. Golubev (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4644, pp. 27-38) https://doi.org/10.1117/12.464145

Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. / Juodkazis, Saulius; Horyama, Makoto; Miwa, Masafumi; Watanabe, Mitsuru; Marcinkevičius, Andrius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / V.Y. Panchenko; V.S. Golubev. Vol. 4644 2002. p. 27-38.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Juodkazis, S, Horyama, M, Miwa, M, Watanabe, M, Marcinkevičius, A, Mizeikis, V, Matsuo, S & Misawa, H 2002, Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. in VY Panchenko & VS Golubev (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4644, pp. 27-38, Seventh International Conference on Laser and Laser-Information Technologies, Suzdal, Russian Federation, 01/6/20. https://doi.org/10.1117/12.464145

Juodkazis, Saulius ; Horyama, Makoto ; Miwa, Masafumi ; Watanabe, Mitsuru ; Marcinkevičius, Andrius ; Mizeikis, Vygantas ; Matsuo, Shigeki ; Misawa, Hiroaki. / Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. Proceedings of SPIE - The International Society for Optical Engineering. editor / V.Y. Panchenko ; V.S. Golubev. Vol. 4644 2002. pp. 27-38

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AU - Marcinkevičius, Andrius

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AB - We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.

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Access to Document

10.1117/12.464145