Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

Saulius Juodkazis; Makoto Horyama; Masafumi Miwa; Mitsuru Watanabe; Andrius Marcinkevičius; Vygantas Mizeikis; Shigeki Matsuo; Hiroaki Misawa

doi:10.1117/12.464145

Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

Saulius Juodkazis, Makoto Horyama, Masafumi Miwa, Mitsuru Watanabe, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

Research output: Contribution to journal › Conference article › peer-review

10 Citations (Scopus)

Abstract

We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.

Original language	English
Pages (from-to)	27-38
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4644
DOIs	https://doi.org/10.1117/12.464145
Publication status	Published - 2002
Externally published	Yes
Event	Seventh International Conference on Laser and Laser-Information Technologies - Suzdal, Russian Federation Duration: 2001 Jun 20 → 2001 Jun 26

Keywords

Defects
Direct laser writing
Light-induced damage threshold
Photopolymerization
Silica
Time-resolved measurements

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. / Juodkazis, Saulius; Horyama, Makoto; Miwa, Masafumi; Watanabe, Mitsuru; Marcinkevičius, Andrius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4644, 2002, p. 27-38.

Research output: Contribution to journal › Conference article › peer-review

@article{9fbc3440390f47bda9b0d097a896f1e1,

title = "Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation",

abstract = "We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.",

keywords = "Defects, Direct laser writing, Light-induced damage threshold, Photopolymerization, Silica, Time-resolved measurements",

author = "Saulius Juodkazis and Makoto Horyama and Masafumi Miwa and Mitsuru Watanabe and Andrius Marcinkevi{\v c}ius and Vygantas Mizeikis and Shigeki Matsuo and Hiroaki Misawa",

note = "Copyright: Copyright 2005 Elsevier Science B.V., Amsterdam. All rights reserved.; Seventh International Conference on Laser and Laser-Information Technologies ; Conference date: 20-06-2001 Through 26-06-2001",

year = "2002",

doi = "10.1117/12.464145",

language = "English",

volume = "4644",

pages = "27--38",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

AU - Juodkazis, Saulius

AU - Horyama, Makoto

AU - Miwa, Masafumi

AU - Watanabe, Mitsuru

AU - Marcinkevičius, Andrius

AU - Mizeikis, Vygantas

AU - Matsuo, Shigeki

AU - Misawa, Hiroaki

PY - 2002

Y1 - 2002

N2 - We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.

AB - We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.

KW - Defects

KW - Direct laser writing

KW - Light-induced damage threshold

KW - Photopolymerization

KW - Silica

KW - Time-resolved measurements

UR - http://www.scopus.com/inward/record.url?scp=0036029053&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036029053&partnerID=8YFLogxK

U2 - 10.1117/12.464145

DO - 10.1117/12.464145

M3 - Conference article

AN - SCOPUS:0036029053

VL - 4644

SP - 27

EP - 38

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - Seventh International Conference on Laser and Laser-Information Technologies

Y2 - 20 June 2001 through 26 June 2001

ER -