Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

Saulius Juodkazis, Makoto Horyama, Masafumi Miwa, Mitsuru Watanabe, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsV.Y. Panchenko, V.S. Golubev
Pages27-38
Number of pages12
Volume4644
DOIs
Publication statusPublished - 2002
Externally publishedYes
EventSeventh International Conference on Laser and Laser-Information Technologies - Suzdal, Russian Federation
Duration: 2001 Jun 202001 Jun 26

Other

OtherSeventh International Conference on Laser and Laser-Information Technologies
CountryRussian Federation
CitySuzdal
Period01/6/2001/6/26

Fingerprint

Stereolithography
transparence
Microfabrication
Laser beam effects
Ultrashort pulses
lithography
Optical data storage
irradiation
Photopolymerization
Lasers
Liquids
Fluidics
Fused silica
Photonic crystals
Photonics
lasers
Resins
photonics
Data storage equipment
Microstructure

Keywords

  • Defects
  • Direct laser writing
  • Light-induced damage threshold
  • Photopolymerization
  • Silica
  • Time-resolved measurements

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Juodkazis, S., Horyama, M., Miwa, M., Watanabe, M., Marcinkevičius, A., Mizeikis, V., ... Misawa, H. (2002). Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. In V. Y. Panchenko, & V. S. Golubev (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4644, pp. 27-38) https://doi.org/10.1117/12.464145

Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. / Juodkazis, Saulius; Horyama, Makoto; Miwa, Masafumi; Watanabe, Mitsuru; Marcinkevičius, Andrius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / V.Y. Panchenko; V.S. Golubev. Vol. 4644 2002. p. 27-38.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Juodkazis, S, Horyama, M, Miwa, M, Watanabe, M, Marcinkevičius, A, Mizeikis, V, Matsuo, S & Misawa, H 2002, Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. in VY Panchenko & VS Golubev (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4644, pp. 27-38, Seventh International Conference on Laser and Laser-Information Technologies, Suzdal, Russian Federation, 01/6/20. https://doi.org/10.1117/12.464145
Juodkazis S, Horyama M, Miwa M, Watanabe M, Marcinkevičius A, Mizeikis V et al. Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. In Panchenko VY, Golubev VS, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4644. 2002. p. 27-38 https://doi.org/10.1117/12.464145
Juodkazis, Saulius ; Horyama, Makoto ; Miwa, Masafumi ; Watanabe, Mitsuru ; Marcinkevičius, Andrius ; Mizeikis, Vygantas ; Matsuo, Shigeki ; Misawa, Hiroaki. / Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. Proceedings of SPIE - The International Society for Optical Engineering. editor / V.Y. Panchenko ; V.S. Golubev. Vol. 4644 2002. pp. 27-38
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