Abstract
We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Editors | V.Y. Panchenko, V.S. Golubev |
| Pages | 27-38 |
| Number of pages | 12 |
| Volume | 4644 |
| DOIs | |
| Publication status | Published - 2002 |
| Externally published | Yes |
| Event | Seventh International Conference on Laser and Laser-Information Technologies - Suzdal, Russian Federation Duration: 2001 Jun 20 → 2001 Jun 26 |
Other
| Other | Seventh International Conference on Laser and Laser-Information Technologies |
|---|---|
| Country | Russian Federation |
| City | Suzdal |
| Period | 01/6/20 → 01/6/26 |
Fingerprint
Keywords
- Defects
- Direct laser writing
- Light-induced damage threshold
- Photopolymerization
- Silica
- Time-resolved measurements
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation. / Juodkazis, Saulius; Horyama, Makoto; Miwa, Masafumi; Watanabe, Mitsuru; Marcinkevičius, Andrius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / V.Y. Panchenko; V.S. Golubev. Vol. 4644 2002. p. 27-38.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation
AU - Juodkazis, Saulius
AU - Horyama, Makoto
AU - Miwa, Masafumi
AU - Watanabe, Mitsuru
AU - Marcinkevičius, Andrius
AU - Mizeikis, Vygantas
AU - Matsuo, Shigeki
AU - Misawa, Hiroaki
PY - 2002
Y1 - 2002
N2 - We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.
AB - We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.
KW - Defects
KW - Direct laser writing
KW - Light-induced damage threshold
KW - Photopolymerization
KW - Silica
KW - Time-resolved measurements
UR - http://www.scopus.com/inward/record.url?scp=0036029053&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0036029053&partnerID=8YFLogxK
U2 - 10.1117/12.464145
DO - 10.1117/12.464145
M3 - Conference contribution
VL - 4644
SP - 27
EP - 38
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Panchenko, V.Y.
A2 - Golubev, V.S.
ER -