Structure and Ferroelectric Properties of High Tc BiScO3-PbTiO3 Epitaxial Thin Films

Kiyotaka Wasa; Shinya Yoshida; Hiroaki Hanzawa; Hideaki Adachi; Toshiyuki Matsunaga; Shuji Tanaka

doi:10.1109/TUFFC.2016.2569624

Structure and Ferroelectric Properties of High T_c BiScO₃-PbTiO₃ Epitaxial Thin Films

Kiyotaka Wasa, Shinya Yoshida, Hiroaki Hanzawa, Hideaki Adachi, Toshiyuki Matsunaga, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Piezoelectric ceramics of new composition with higher Curie temperature T_c are extensively studied for better piezoelectric microelectromechanical systems (MEMS). Apart from the compositional research, enhanced T_c could be achieved in a modified structure. We have considered that a designed laminated structure of Pb(Zr, Ti)O₃ (PZT)-based thin film, i.e., relaxed heteroepitaxial epitaxial thin film, is one of the promising modified structures to enhance T_c. This structure exhibits an extraordinarily high T_c, i.e., T_c ∼ 600 °C (bulk T_c∼ 365 °C). In this paper, we have fabricated the designed laminated structure of high T_c (1-x)BiScO₃-xPbTiO₃. T_c of BS-0.8PT thin films was found to be extraordinarily high, i.e., T_c∼ 750 °C (bulk T_c, ∼ 500 °C). Their ferroelectric performances were comparable to those of PZT-based thin films. The present BS-xPT thin films have a high potential for fabrication of high-temperature-stable piezoelectric MEMS. The mechanism of the enhanced T_c is probably the presence of the mechanically stable interface to temperature in the laminated structure. We believe this designed laminated structure can extract fruitful properties of bulk ferroelectric ceramics.

Original language	English
Article number	7470471
Pages (from-to)	1636-1641
Number of pages	6
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	63
Issue number	10
DOIs	https://doi.org/10.1109/TUFFC.2016.2569624
Publication status	Published - 2016 Oct
Externally published	Yes

Keywords

(1 - x)BiScOPbTiO (BS-xPT) thin films
heteroepitaxial thin films
high Curie temperature
laminated structure
relaxed heteroepitaxial structure

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

Access to Document

10.1109/TUFFC.2016.2569624

Cite this

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title = "Structure and Ferroelectric Properties of High Tc BiScO3-PbTiO3 Epitaxial Thin Films",

abstract = "Piezoelectric ceramics of new composition with higher Curie temperature Tc are extensively studied for better piezoelectric microelectromechanical systems (MEMS). Apart from the compositional research, enhanced Tc could be achieved in a modified structure. We have considered that a designed laminated structure of Pb(Zr, Ti)O3 (PZT)-based thin film, i.e., relaxed heteroepitaxial epitaxial thin film, is one of the promising modified structures to enhance Tc. This structure exhibits an extraordinarily high Tc, i.e., Tc ∼ 600 °C (bulk Tc∼ 365 °C). In this paper, we have fabricated the designed laminated structure of high Tc (1-x)BiScO3-xPbTiO3. Tc of BS-0.8PT thin films was found to be extraordinarily high, i.e., Tc∼ 750 °C (bulk Tc, ∼ 500 °C). Their ferroelectric performances were comparable to those of PZT-based thin films. The present BS-xPT thin films have a high potential for fabrication of high-temperature-stable piezoelectric MEMS. The mechanism of the enhanced Tc is probably the presence of the mechanically stable interface to temperature in the laminated structure. We believe this designed laminated structure can extract fruitful properties of bulk ferroelectric ceramics.",

keywords = "(1 - x)BiScOPbTiO (BS-xPT) thin films, heteroepitaxial thin films, high Curie temperature, laminated structure, relaxed heteroepitaxial structure",

author = "Kiyotaka Wasa and Shinya Yoshida and Hiroaki Hanzawa and Hideaki Adachi and Toshiyuki Matsunaga and Shuji Tanaka",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.",

year = "2016",

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T1 - Structure and Ferroelectric Properties of High Tc BiScO3-PbTiO3 Epitaxial Thin Films

AU - Wasa, Kiyotaka

AU - Yoshida, Shinya

AU - Hanzawa, Hiroaki

AU - Adachi, Hideaki

AU - Matsunaga, Toshiyuki

AU - Tanaka, Shuji

PY - 2016/10

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