Abstract
In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.
| Original language | English |
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| Pages | 435-438 |
| Number of pages | 4 |
| Publication status | Published - 2002 Dec 1 |
| Event | First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States Duration: 2002 Jun 12 → 2002 Jun 14 |
Conference
| Conference | First IEEE International Conference on Sensors - IEEE Sensors 2002 |
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| Country/Territory | United States |
| City | Orlando, FL |
| Period | 02/6/12 → 02/6/14 |
Keywords
- Gas sensor
- Heat of adsorption
- Y-cut resonator
ASJC Scopus subject areas
- Electrical and Electronic Engineering