Abstract
In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of IEEE Sensors |
| Pages | 435-438 |
| Number of pages | 4 |
| Volume | 1 |
| Edition | 1 |
| Publication status | Published - 2002 |
| Event | First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL Duration: 2002 Jun 12 → 2002 Jun 14 |
Other
| Other | First IEEE International Conference on Sensors - IEEE Sensors 2002 |
|---|---|
| City | Orlando, FL |
| Period | 02/6/12 → 02/6/14 |
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Keywords
- Gas sensor
- Heat of adsorption
- Y-cut resonator
ASJC Scopus subject areas
- Engineering (miscellaneous)
- Electrical and Electronic Engineering
Cite this
Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance. / Saitoh, Atsushi; Asari, Yukihiro; Nomura, Tooru.
Proceedings of IEEE Sensors. Vol. 1 1. ed. 2002. p. 435-438.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance
AU - Saitoh, Atsushi
AU - Asari, Yukihiro
AU - Nomura, Tooru
PY - 2002
Y1 - 2002
N2 - In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.
AB - In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.
KW - Gas sensor
KW - Heat of adsorption
KW - Y-cut resonator
UR - http://www.scopus.com/inward/record.url?scp=1542331697&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=1542331697&partnerID=8YFLogxK
M3 - Conference contribution
VL - 1
SP - 435
EP - 438
BT - Proceedings of IEEE Sensors
ER -