Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance

Atsushi Saitoh, Yukihiro Asari, Tooru Nomura

Research output: Contribution to conferencePaper

Abstract

In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.

Original languageEnglish
Pages435-438
Number of pages4
Publication statusPublished - 2002 Dec 1
EventFirst IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States
Duration: 2002 Jun 122002 Jun 14

Conference

ConferenceFirst IEEE International Conference on Sensors - IEEE Sensors 2002
CountryUnited States
CityOrlando, FL
Period02/6/1202/6/14

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Keywords

  • Gas sensor
  • Heat of adsorption
  • Y-cut resonator

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Saitoh, A., Asari, Y., & Nomura, T. (2002). Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance. 435-438. Paper presented at First IEEE International Conference on Sensors - IEEE Sensors 2002, Orlando, FL, United States.