Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance

Atsushi Saitoh; Yukihiro Asari; Tooru Nomura

Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance

Atsushi Saitoh, Yukihiro Asari, Tooru Nomura

Research output: Contribution to conference › Paper

Abstract

In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.

Original language	English
Pages	435-438
Number of pages	4
Publication status	Published - 2002 Dec 1
Event	First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States Duration: 2002 Jun 12 → 2002 Jun 14

Conference

Conference	First IEEE International Conference on Sensors - IEEE Sensors 2002
Country	United States
City	Orlando, FL
Period	02/6/12 → 02/6/14

Keywords

Gas sensor
Heat of adsorption
Y-cut resonator

ASJC Scopus subject areas

Electrical and Electronic Engineering

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abstract = "In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.",

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AU - Nomura, Tooru

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KW - Heat of adsorption

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