Study of La-induced flat band voltage shift in Metal/HfLaOx/SiO2/Si capacitors

Y.Yamamoto Y.Yamamoto, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalJapanese Journal of Applied Physics Letters 46
Publication statusPublished - 2007 Nov 1

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