Study of La-induced flat band voltage shift in Metal/HfLaOx/SiO2/Si capacitors

Y.Yamamoto Y.Yamamoto, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Japanese Journal of Applied Physics Letters 46
Publication status	Published - 2007 Nov 1

Cite this

@article{4159b6cbac7a45b2990ce7b91d4f6706,

title = "Study of La-induced flat band voltage shift in Metal/HfLaOx/SiO2/Si capacitors",

author = "Y.Yamamoto Y.Yamamoto and K.Kita K.Kita and K.Kyuno K.Kyuno and A.Toriumi A.Toriumi and Kentaro Kyuno",

year = "2007",

month = nov,

day = "1",

language = "English",

journal = "Japanese Journal of Applied Physics Letters 46",

}