Study of PZT Thin Film Deposition

Katsuhiro Tanaka, Kazumasa Shibata, Shinya Ishikawa, Kenji Suita, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)45-46
JournalProceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)
Publication statusPublished - 2010 Jun 29

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