Study of PZT Thin Film Deposition

Katsuhiro Tanaka, Kazumasa Shibata, Shinya Ishikawa, Kenji Suita, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)45-46
JournalProceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)
Publication statusPublished - 2010 Jun 29

Cite this

Study of PZT Thin Film Deposition. / Tanaka, Katsuhiro; Shibata, Kazumasa; Ishikawa, Shinya; Suita, Kenji; Nagasawa, Sumito; Kuwano, Hiroki.

In: Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010), 29.06.2010, p. 45-46.

Research output: Contribution to journalArticle

Tanaka, Katsuhiro ; Shibata, Kazumasa ; Ishikawa, Shinya ; Suita, Kenji ; Nagasawa, Sumito ; Kuwano, Hiroki. / Study of PZT Thin Film Deposition. In: Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010). 2010 ; pp. 45-46.
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