Study of PZT Thin Film Deposition

Katsuhiro Tanaka, Kazumasa Shibata, Shinya Ishikawa, Kenji Suita, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	45-46
Journal	Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)
Publication status	Published - 2010 Jun 29

Cite this

@article{beb10bdd9c0f40b29a769e4fd725bdbe,

title = "Study of PZT Thin Film Deposition",

author = "Katsuhiro Tanaka and Kazumasa Shibata and Shinya Ishikawa and Kenji Suita and Sumito Nagasawa and Hiroki Kuwano",

year = "2010",

month = jun,

day = "29",

language = "English",

pages = "45--46",

journal = "Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)",

}

TY - JOUR

T1 - Study of PZT Thin Film Deposition

AU - Tanaka, Katsuhiro

AU - Shibata, Kazumasa

AU - Ishikawa, Shinya

AU - Suita, Kenji

AU - Nagasawa, Sumito

AU - Kuwano, Hiroki

PY - 2010/6/29

Y1 - 2010/6/29

M3 - Article

SP - 45

EP - 46

JO - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)

JF - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)

ER -