Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production

S. Fukui, R. Sato, J. Ogawa, Tetsuo Oka, M. Yamaguchi, T. Sato, S. Miyazaki, T. Sasahara, T. Tamaki, S. Nishiwaki, Y. Yuki

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Ultra-fine patterning of several ten nanometer pitch for semiconductor devices is required for higher integrations of circuit elements and, therefore, extremely high preciseness and quality are also required for patterning of microstructures on photo masks. A serious problem that causes the deterioration of pattern preciseness of photo mask is the deposition of micron or sub-micron particles, such as oil dusts, that generate from mechanical bearings of the spin processors in the grooves of the micro patterns. In this work, application of magnetic levitation utilizing high temperature superconducting (HTS) bulks to the spin processors for the photo mask production is proposed. To address this issue, a small size test spinner utilizing the magnetic levitation with the HTS bulks is developed to investigate its applicability to the spin processors for the photo mask production. The structure of the test spinner is presented and the results of levitation and rotation tests are reported in this paper. The test results show the basic compatibility of the magnetic levitation with the HTS bulks to the spin processor.

Original languageEnglish
Pages (from-to)1289-1292
Number of pages4
JournalPhysica C: Superconductivity and its Applications
Volume463-465
Issue numberSUPPL.
DOIs
Publication statusPublished - 2007 Oct 1
Externally publishedYes

Fingerprint

Magnetic levitation
levitation
central processing units
Masks
masks
spinners
Bearings (structural)
Temperature
Semiconductor devices
semiconductor devices
deterioration
grooves
compatibility
Particles (particulate matter)
Dust
Deterioration
Oils
oils
dust
microstructure

Keywords

  • HTS bulk
  • Magnetic levitation
  • Photo mask
  • Spin processor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

Cite this

Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production. / Fukui, S.; Sato, R.; Ogawa, J.; Oka, Tetsuo; Yamaguchi, M.; Sato, T.; Miyazaki, S.; Sasahara, T.; Tamaki, T.; Nishiwaki, S.; Yuki, Y.

In: Physica C: Superconductivity and its Applications, Vol. 463-465, No. SUPPL., 01.10.2007, p. 1289-1292.

Research output: Contribution to journalArticle

Fukui, S, Sato, R, Ogawa, J, Oka, T, Yamaguchi, M, Sato, T, Miyazaki, S, Sasahara, T, Tamaki, T, Nishiwaki, S & Yuki, Y 2007, 'Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production', Physica C: Superconductivity and its Applications, vol. 463-465, no. SUPPL., pp. 1289-1292. https://doi.org/10.1016/j.physc.2007.04.300
Fukui, S. ; Sato, R. ; Ogawa, J. ; Oka, Tetsuo ; Yamaguchi, M. ; Sato, T. ; Miyazaki, S. ; Sasahara, T. ; Tamaki, T. ; Nishiwaki, S. ; Yuki, Y. / Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production. In: Physica C: Superconductivity and its Applications. 2007 ; Vol. 463-465, No. SUPPL. pp. 1289-1292.
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