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Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production
S. Fukui, R. Sato, J. Ogawa, T. Oka, M. Yamaguchi, T. Sato, S. Miyazaki, T. Sasahara, T. Tamaki, S. Nishiwaki, Y. Yuki
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)