Fingerprint
Dive into the research topics of 'Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
S. Fukui, R. Sato, J. Ogawa, T. Oka, M. Yamaguchi, T. Sato, S. Miyazaki, T. Sasahara, T. Tamaki, S. Nishiwaki, Y. Yuki
Research output: Contribution to journal › Article › peer-review