Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production

S. Fukui, R. Sato, J. Ogawa, T. Oka, M. Yamaguchi, T. Sato, S. Miyazaki, T. Sasahara, T. Tamaki, S. Nishiwaki, Y. Yuki

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science