Supersonic Free-Jet PVD for Nano-Coating

A. Yumoto, T. Naruse, F. Hiroki, T. Yamamoto, M. Kosaka, K. Fukawa, I. Shiota, N. Niwa

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2002 Nov 7

Cite this

Yumoto, A., Naruse, T., Hiroki, F., Yamamoto, T., Kosaka, M., Fukawa, K., Shiota, I., & Niwa, N. (2002). Supersonic Free-Jet PVD for Nano-Coating. Default journal.