Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Japanese Journal of Applied Physics Letters 46
Publication status	Published - 2007 Jul 1

Cite this

@article{bc062b9712bf4f009eadbacf83b9c82f,

title = "Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment",

author = "Y.Zhao Y.Zhao and K.Kita K.Kita and K.Kyuno K.Kyuno and A.Toriumi A.Toriumi and Kentaro Kyuno",

year = "2007",

month = jul,

day = "1",

language = "English",

journal = "Japanese Journal of Applied Physics Letters 46",

}

TY - JOUR

T1 - Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment

AU - Y.Zhao, Y.Zhao

AU - K.Kita, K.Kita

AU - K.Kyuno, K.Kyuno

AU - A.Toriumi, A.Toriumi

AU - Kyuno, Kentaro

PY - 2007/7/1

Y1 - 2007/7/1

M3 - Article

JO - Japanese Journal of Applied Physics Letters 46

JF - Japanese Journal of Applied Physics Letters 46

ER -