Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalJapanese Journal of Applied Physics Letters 46
Publication statusPublished - 2007 Jul 1

Cite this

Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment. / Y.Zhao, Y.Zhao; K.Kita, K.Kita; K.Kyuno, K.Kyuno; A.Toriumi, A.Toriumi; Kyuno, Kentaro.

In: Japanese Journal of Applied Physics Letters 46, 01.07.2007.

Research output: Contribution to journalArticle

@article{bc062b9712bf4f009eadbacf83b9c82f,
title = "Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment",
author = "Y.Zhao Y.Zhao and K.Kita K.Kita and K.Kyuno K.Kyuno and A.Toriumi A.Toriumi and Kentaro Kyuno",
year = "2007",
month = "7",
day = "1",
language = "English",
journal = "Japanese Journal of Applied Physics Letters 46",

}

TY - JOUR

T1 - Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment

AU - Y.Zhao, Y.Zhao

AU - K.Kita, K.Kita

AU - K.Kyuno, K.Kyuno

AU - A.Toriumi, A.Toriumi

AU - Kyuno, Kentaro

PY - 2007/7/1

Y1 - 2007/7/1

M3 - Article

JO - Japanese Journal of Applied Physics Letters 46

JF - Japanese Journal of Applied Physics Letters 46

ER -