Surface acoustic wave based sensors employing ionic liquid for hydrogen sulfide gas detection

Yoshinobu Murakawa, Motoaki Hara, Hiroyuki Oguchi, Yuichiro Hamate, Hiroki Kuwano

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

This paper describes a new type hydrogen sulfide (H2S) gas sensor using ionic liquid (IL). In this sensor, a reservoir for the IL was integrated on a surface acoustic wave (SAW) resonator. The IL serves as an absorber for H2S gas. Mass change due to this absorption is detected as shift in the resonant frequency. In this study, we fabricated and demonstrated the sensor using the lithium niobate (LiNbO3) SAW resonator with the resonant frequency of 38 MHz. The integrated reservoir was filled by the IL 1-butyl-3-methylimidazolium hexafluorophosphate ([bmim]-[PF6]). As an experimental result, we observed the linear correlation between the frequency-shift and the exposure time of the sensor to the H2S gas.

Original languageEnglish
Pages (from-to)1255-1259
Number of pages5
JournalMicrosystem Technologies
Volume19
Issue number8
DOIs
Publication statusPublished - 2013 Aug
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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