Abstract
This paper describes a new type hydrogen sulfide (H2S) gas sensor using ionic liquid (IL). In this sensor, a reservoir for the IL was integrated on a surface acoustic wave (SAW) resonator. The IL serves as an absorber for H2S gas. Mass change due to this absorption is detected as shift in the resonant frequency. In this study, we fabricated and demonstrated the sensor using the lithium niobate (LiNbO3) SAW resonator with the resonant frequency of 38 MHz. The integrated reservoir was filled by the IL 1-butyl-3-methylimidazolium hexafluorophosphate ([bmim]-[PF6]). As an experimental result, we observed the linear correlation between the frequency-shift and the exposure time of the sensor to the H2S gas.
Original language | English |
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Pages (from-to) | 1255-1259 |
Number of pages | 5 |
Journal | Microsystem Technologies |
Volume | 19 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2013 Aug |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering