Surface acoustic wave liquid sensor using dual mode delay line

T. Nomura, M. Uchiyama, A. Saitoh, S. Furukawa

Research output: Contribution to conferencePaperpeer-review

2 Citations (Scopus)

Abstract

A new surface acoustic wave(SAW) liquid sensor system is described. SAW devices offer many attractive feature for applications as many sensors. In this paper two surface acoustic waves having shear horizontal(SH mode) and shear vertical(R mode) displacement have been used for measuring the acoustic properties of liquid. SH and R mode SAW delay line were constructed on one 36° YX LiTaO3 substrate. The SH mode SAW was excited on the X direction and the R mode SAW was excited on the direction at 90° to X on the substrate by interdigital transducer (IDT). The measurements of the acoustic properties of liquid were performed for water/glycerol mixtures. The experimental results show that the velocity of the SH and R mode SAW depend to the viscosity and the density of the loaded mixtures, respectively. These results indicate that the dual mode SAW sensor is very suitable for determining the acoustic properties of liquid.

Original languageEnglish
Pages289-292
Number of pages4
Publication statusPublished - 1998 Dec 1
EventProceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) - Montreaux, Switz
Duration: 1998 Aug 241998 Aug 27

Other

OtherProceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI)
CityMontreaux, Switz
Period98/8/2498/8/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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