Surface acoustic wave vapor sensor using ultrathin multilayer films

T. Nomura, Atsushi Saitoh, S. Furukawa

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

A surface acoustic wave (SAW) sensor incorporating an ultrathin selective film is presented. The ultrathin films were made by both self-assembled method and by Langmuir-Blodgett method. SAW delay lines coated with SA film and LB film has been used as vapor sensor. Rapid and totally reversible sensor responses were obtained by using the thin monolayer film.

Original languageEnglish
Title of host publicationProceedings of the Annual IEEE International Frequency Control Symposium
PublisherIEEE
Pages1082-1085
Number of pages4
Volume2
Publication statusPublished - 1999

Fingerprint

Ultrathin films
Multilayer films
Surface waves
Vapors
Acoustic waves
Sensors
Langmuir Blodgett films
Electric delay lines
Monolayers

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Nomura, T., Saitoh, A., & Furukawa, S. (1999). Surface acoustic wave vapor sensor using ultrathin multilayer films. In Proceedings of the Annual IEEE International Frequency Control Symposium (Vol. 2, pp. 1082-1085). IEEE.

Surface acoustic wave vapor sensor using ultrathin multilayer films. / Nomura, T.; Saitoh, Atsushi; Furukawa, S.

Proceedings of the Annual IEEE International Frequency Control Symposium. Vol. 2 IEEE, 1999. p. 1082-1085.

Research output: Chapter in Book/Report/Conference proceedingChapter

Nomura, T, Saitoh, A & Furukawa, S 1999, Surface acoustic wave vapor sensor using ultrathin multilayer films. in Proceedings of the Annual IEEE International Frequency Control Symposium. vol. 2, IEEE, pp. 1082-1085.
Nomura T, Saitoh A, Furukawa S. Surface acoustic wave vapor sensor using ultrathin multilayer films. In Proceedings of the Annual IEEE International Frequency Control Symposium. Vol. 2. IEEE. 1999. p. 1082-1085
Nomura, T. ; Saitoh, Atsushi ; Furukawa, S. / Surface acoustic wave vapor sensor using ultrathin multilayer films. Proceedings of the Annual IEEE International Frequency Control Symposium. Vol. 2 IEEE, 1999. pp. 1082-1085
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