Surface acoustic wave vapor sensor using ultrathin multilayer films

T. Nomura, A. Saitoh, S. Furukawa

Research output: Contribution to journalArticle

Abstract

A surface acoustic wave (SAW) sensor incorporating an ultrathin selective film is presented. The ultrathin films were made by both self-assembled method and by Langmuir-Blodgett method. SAW delay lines coated with SA film and LB film has been used as vapor sensor. Rapid and totally reversible sensor responses were obtained by using the thin monolayer film.

Original languageEnglish
Pages (from-to)1082-1085
Number of pages4
JournalProceedings of the Annual IEEE International Frequency Control Symposium
Volume2
Publication statusPublished - 1999 Dec 1

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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