Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect

Hideki Yokoi, Tetsuya Mizumoto, Takashi Sakai, Takafumi Ohtsuka, Yoshiaki Nakano

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.

Original languageEnglish
Pages (from-to)5094-5097
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number8
Publication statusPublished - 2003 Aug 1

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Keywords

  • Air bridge
  • Magnetic gamet
  • Magnetooptic effect
  • Optical isolator
  • Surface micromachining

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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