Surface Modifications and Micromachining of Diamond by Proton Beam Writing

Y. Harashima; T. Kaneko; H. Nishikawa; H. Kato; S. Yamasaki

Surface Modifications and Micromachining of Diamond by Proton Beam Writing

Y. Harashima, T. Kaneko, H. Nishikawa, H. Kato, S. Yamasaki

Regional Environment Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams
Publication status	Published - 2011 Jun 1

Cite this

Surface Modifications and Micromachining of Diamond by Proton Beam Writing. / Harashima, Y.; Kaneko, T.; Nishikawa, H.; Kato, H.; Yamasaki, S.

In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, 01.06.2011.

Research output: Contribution to journal › Article › peer-review

@article{88f41436d1084d3da6844bb0c35d692e,

title = "Surface Modifications and Micromachining of Diamond by Proton Beam Writing",

author = "Y. Harashima and T. Kaneko and H. Nishikawa and H. Kato and S. Yamasaki",

year = "2011",

month = jun,

day = "1",

language = "English",

journal = "International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams",

}

TY - JOUR

T1 - Surface Modifications and Micromachining of Diamond by Proton Beam Writing

AU - Harashima, Y.

AU - Kaneko, T.

AU - Nishikawa, H.

AU - Kato, H.

AU - Yamasaki, S.

PY - 2011/6/1

Y1 - 2011/6/1

M3 - Article

JO - International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams

JF - International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams

ER -