Surface Modifications and Micromachining of Diamond by Proton Beam Writing

Y. Harashima, T. Kaneko, H. Nishikawa, H. Kato, S. Yamasaki

Research output: Contribution to journal › Article

Original languageEnglish
JournalInternational Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams
Publication statusPublished - 2011 Jun 1

Cite this

Surface Modifications and Micromachining of Diamond by Proton Beam Writing. / Harashima, Y.; Kaneko, T.; Nishikawa, H.; Kato, H.; Yamasaki, S.

In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, 01.06.2011.

Research output: Contribution to journal › Article

Harashima, Y, Kaneko, T, Nishikawa, H, Kato, H & Yamasaki, S 2011, 'Surface Modifications and Micromachining of Diamond by Proton Beam Writing', International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams.
Harashima Y, Kaneko T, Nishikawa H, Kato H, Yamasaki S. Surface Modifications and Micromachining of Diamond by Proton Beam Writing. International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams. 2011 Jun 1.
Harashima, Y. ; Kaneko, T. ; Nishikawa, H. ; Kato, H. ; Yamasaki, S. / Surface Modifications and Micromachining of Diamond by Proton Beam Writing. In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams. 2011.
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