Surface Modifications and Micromachining of Diamond by Proton Beam Writing

Y. Harashima; T. Kaneko; H. Nishikawa; H. Kato; S. Yamasaki

Surface Modifications and Micromachining of Diamond by Proton Beam Writing

Y. Harashima, T. Kaneko, H. Nishikawa, H. Kato, S. Yamasaki

Regional Environment Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams
Publication status	Published - 2011 Jun 1

Cite this

Surface Modifications and Micromachining of Diamond by Proton Beam Writing. / Harashima, Y.; Kaneko, T.; Nishikawa, H. et al.

In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, 01.06.2011.

Research output: Contribution to journal › Article › peer-review

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