Surface Modifications and Micromachining of Diamond by Proton Beam Writing

Y. Harashima, T. Kaneko, H. Nishikawa, H. Kato, S. Yamasaki

Research output: Contribution to journalArticle

Cite this

@article{88f41436d1084d3da6844bb0c35d692e,
title = "Surface Modifications and Micromachining of Diamond by Proton Beam Writing",
author = "Y. Harashima and T. Kaneko and H. Nishikawa and H. Kato and S. Yamasaki",
year = "2011",
month = "6",
day = "1",
language = "English",
journal = "International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams",

}

TY - JOUR

T1 - Surface Modifications and Micromachining of Diamond by Proton Beam Writing

AU - Harashima, Y.

AU - Kaneko, T.

AU - Nishikawa, H.

AU - Kato, H.

AU - Yamasaki, S.

PY - 2011/6/1

Y1 - 2011/6/1

M3 - Article

JO - International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams

JF - International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams

ER -