Surface Modifications and Micromachining of Diamond by Proton Beam Writing

Y. Harashima; T. Kaneko; H. Nishikawa; H. Kato; S. Yamasaki

Surface Modifications and Micromachining of Diamond by Proton Beam Writing

Y. Harashima, T. Kaneko, H. Nishikawa, H. Kato, S. Yamasaki

Regional Environment Systems

Research output: Contribution to journal › Article

Original language	English
Journal	International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams
Publication status	Published - 2011 Jun 1

Cite this

Harashima, Y., Kaneko, T., Nishikawa, H., Kato, H., & Yamasaki, S. (2011). Surface Modifications and Micromachining of Diamond by Proton Beam Writing. International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams.

Surface Modifications and Micromachining of Diamond by Proton Beam Writing. / Harashima, Y.; Kaneko, T.; Nishikawa, H.; Kato, H.; Yamasaki, S.

In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, 01.06.2011.

Research output: Contribution to journal › Article

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author = "Y. Harashima and T. Kaneko and H. Nishikawa and H. Kato and S. Yamasaki",

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AU - Harashima, Y.

AU - Kaneko, T.

AU - Nishikawa, H.

AU - Kato, H.

AU - Yamasaki, S.

PY - 2011/6/1

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M3 - Article

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