Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

Takuro Tomita, Ryota Kumai, Hidenori Nomura, Shigeki Matsuo, Shuichi Hashimoto, Ken Morita, Toshiro Isu

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.

Original languageEnglish
Pages (from-to)89-94
Number of pages6
JournalApplied Physics A: Materials Science and Processing
Volume105
Issue number1
DOIs
Publication statusPublished - 2011 Oct
Externally publishedYes

Fingerprint

Silicon
Ultrashort pulses
Laser beams
Nanostructures
Surface roughness
Laser beam effects
Electric fields
Wavelength
Irradiation

ASJC Scopus subject areas

  • Materials Science(all)
  • Chemistry(all)

Cite this

Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface. / Tomita, Takuro; Kumai, Ryota; Nomura, Hidenori; Matsuo, Shigeki; Hashimoto, Shuichi; Morita, Ken; Isu, Toshiro.

In: Applied Physics A: Materials Science and Processing, Vol. 105, No. 1, 10.2011, p. 89-94.

Research output: Contribution to journalArticle

Tomita, Takuro ; Kumai, Ryota ; Nomura, Hidenori ; Matsuo, Shigeki ; Hashimoto, Shuichi ; Morita, Ken ; Isu, Toshiro. / Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface. In: Applied Physics A: Materials Science and Processing. 2011 ; Vol. 105, No. 1. pp. 89-94.
@article{ab5a2749daeb460ba873b72fdb31b081,
title = "Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface",
abstract = "Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.",
author = "Takuro Tomita and Ryota Kumai and Hidenori Nomura and Shigeki Matsuo and Shuichi Hashimoto and Ken Morita and Toshiro Isu",
year = "2011",
month = "10",
doi = "10.1007/s00339-011-6490-1",
language = "English",
volume = "105",
pages = "89--94",
journal = "Applied Physics",
issn = "0340-3793",
publisher = "Springer Heidelberg",
number = "1",

}

TY - JOUR

T1 - Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

AU - Tomita, Takuro

AU - Kumai, Ryota

AU - Nomura, Hidenori

AU - Matsuo, Shigeki

AU - Hashimoto, Shuichi

AU - Morita, Ken

AU - Isu, Toshiro

PY - 2011/10

Y1 - 2011/10

N2 - Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.

AB - Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.

UR - http://www.scopus.com/inward/record.url?scp=80053570803&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80053570803&partnerID=8YFLogxK

U2 - 10.1007/s00339-011-6490-1

DO - 10.1007/s00339-011-6490-1

M3 - Article

AN - SCOPUS:80053570803

VL - 105

SP - 89

EP - 94

JO - Applied Physics

JF - Applied Physics

SN - 0340-3793

IS - 1

ER -