Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

Takuro Tomita, Ryota Kumai, Hidenori Nomura, Shigeki Matsuo, Shuichi Hashimoto, Ken Morita, Toshiro Isu

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

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Engineering & Materials Science

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