Surface structures of femtosecond laser irradiated 4H-SiC crystal

Takuro Tomita; Keita Kinoshita; Shigeki Matsuo

doi:10.1109/CLEOPR.2005.1569875

Surface structures of femtosecond laser irradiated 4H-SiC crystal

Takuro Tomita, Keita Kinoshita, Shigeki Matsuo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.

Original language	English
Title of host publication	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Pages	1744-1745
Number of pages	2
DOIs	https://doi.org/10.1109/CLEOPR.2005.1569875
Publication status	Published - 2005 Dec 1
Externally published	Yes
Event	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, Japan Duration: 2005 Jul 11 → 2005 Jul 15

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	2005

Conference

Conference	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Country/Territory	Japan
City	Tokyo
Period	05/7/11 → 05/7/15

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2005.1569875

Cite this

Surface structures of femtosecond laser irradiated 4H-SiC crystal. / Tomita, Takuro; Kinoshita, Keita; Matsuo, Shigeki.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. 2005. p. 1744-1745 1569875 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tomita, T, Kinoshita, K & Matsuo, S 2005, Surface structures of femtosecond laser irradiated 4H-SiC crystal. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005., 1569875, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2005, pp. 1744-1745, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005, Tokyo, Japan, 05/7/11. https://doi.org/10.1109/CLEOPR.2005.1569875

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abstract = "Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.",

author = "Takuro Tomita and Keita Kinoshita and Shigeki Matsuo",

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doi = "10.1109/CLEOPR.2005.1569875",

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AU - Kinoshita, Keita

AU - Matsuo, Shigeki

PY - 2005/12/1

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N2 - Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.

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ER -

Surface structures of femtosecond laser irradiated 4H-SiC crystal

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