Surface structures of femtosecond laser irradiated 4H-SiC crystal

Takuro Tomita, Keita Kinoshita, Shigeki Matsuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.

Original languageEnglish
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Pages1744-1745
Number of pages2
Volume2005
DOIs
Publication statusPublished - 2005
Externally publishedYes
EventPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo
Duration: 2005 Jul 112005 Jul 15

Other

OtherPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
CityTokyo
Period05/7/1105/7/15

Fingerprint

pulses
crystals
lasers
intervals
scanning electron microscopy
energy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Tomita, T., Kinoshita, K., & Matsuo, S. (2005). Surface structures of femtosecond laser irradiated 4H-SiC crystal. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest (Vol. 2005, pp. 1744-1745). [1569875] https://doi.org/10.1109/CLEOPR.2005.1569875

Surface structures of femtosecond laser irradiated 4H-SiC crystal. / Tomita, Takuro; Kinoshita, Keita; Matsuo, Shigeki.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 2005 2005. p. 1744-1745 1569875.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tomita, T, Kinoshita, K & Matsuo, S 2005, Surface structures of femtosecond laser irradiated 4H-SiC crystal. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. vol. 2005, 1569875, pp. 1744-1745, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005, Tokyo, 05/7/11. https://doi.org/10.1109/CLEOPR.2005.1569875
Tomita T, Kinoshita K, Matsuo S. Surface structures of femtosecond laser irradiated 4H-SiC crystal. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 2005. 2005. p. 1744-1745. 1569875 https://doi.org/10.1109/CLEOPR.2005.1569875
Tomita, Takuro ; Kinoshita, Keita ; Matsuo, Shigeki. / Surface structures of femtosecond laser irradiated 4H-SiC crystal. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 2005 2005. pp. 1744-1745
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