Synthesis and properties of tantalum oxide films by sol-gel method using photoirradiation

T.Ohishi T.Ohishi, S.Maekawa S.Maekawa, A.Katou A.Katou, Tomoji Oishi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Journal6th International Workshop on Glasses and Ceramics from Gels (Sevilla, Spain)
Publication statusPublished - 1991 Oct 1

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