Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst

Yuki Fujishima, Kazuyoshi Ueno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new process using a Co-N catalyst has been developed to perform doping simultaneously with film formation in solid phase deposition method (SPD) which does not require transfer of multilayer graphene (MLG). Nitrogen doping into MLG was confirmed by XPS and UPS and succeeded in reducing sheet resistance by about 36%.

Original languageEnglish
Title of host publication2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages354-356
Number of pages3
ISBN (Electronic)9781538665084
DOIs
Publication statusPublished - 2019 Mar
Event2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 - Singapore, Singapore
Duration: 2019 Mar 122019 Mar 15

Publication series

Name2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019

Conference

Conference2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
CountrySingapore
CitySingapore
Period19/3/1219/3/15

Keywords

  • doping
  • multilayer graphene
  • solid-phase deosition

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Hardware and Architecture

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  • Cite this

    Fujishima, Y., & Ueno, K. (2019). Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst. In 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 (pp. 354-356). [8731097] (2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDTM.2019.8731097