@inproceedings{99cc2a815c88474cac95e4b5f1bd6de6,
title = "Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst",
abstract = "A new process using a Co-N catalyst has been developed to perform doping simultaneously with film formation in solid phase deposition method (SPD) which does not require transfer of multilayer graphene (MLG). Nitrogen doping into MLG was confirmed by XPS and UPS and succeeded in reducing sheet resistance by about 36%.",
keywords = "doping, multilayer graphene, solid-phase deosition",
author = "Yuki Fujishima and Kazuyoshi Ueno",
year = "2019",
month = mar,
doi = "10.1109/EDTM.2019.8731097",
language = "English",
series = "2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "354--356",
booktitle = "2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019",
note = "2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 ; Conference date: 12-03-2019 Through 15-03-2019",
}