Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst

Yuki Fujishima; Kazuyoshi Ueno

doi:10.1109/EDTM.2019.8731097

Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A new process using a Co-N catalyst has been developed to perform doping simultaneously with film formation in solid phase deposition method (SPD) which does not require transfer of multilayer graphene (MLG). Nitrogen doping into MLG was confirmed by XPS and UPS and succeeded in reducing sheet resistance by about 36%.

Original language	English
Title of host publication	2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	354-356
Number of pages	3
ISBN (Electronic)	9781538665084
DOIs	https://doi.org/10.1109/EDTM.2019.8731097
Publication status	Published - 2019 Mar
Event	2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 - Singapore, Singapore Duration: 2019 Mar 12 → 2019 Mar 15

Publication series

Name	2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019

Conference

Conference	2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
Country	Singapore
City	Singapore
Period	19/3/12 → 19/3/15

Keywords

doping
multilayer graphene
solid-phase deosition

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation
Hardware and Architecture

Access to Document

10.1109/EDTM.2019.8731097

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Cite this

Fujishima, Y., & Ueno, K. (2019). Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst. In 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 (pp. 354-356). [8731097] (2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDTM.2019.8731097

Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst. / Fujishima, Yuki; Ueno, Kazuyoshi.

2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 354-356 8731097 (2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fujishima, Y & Ueno, K 2019, Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst. in 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019., 8731097, 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019, Institute of Electrical and Electronics Engineers Inc., pp. 354-356, 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019, Singapore, Singapore, 19/3/12. https://doi.org/10.1109/EDTM.2019.8731097

Fujishima Y, Ueno K. Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst. In 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 354-356. 8731097. (2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019). https://doi.org/10.1109/EDTM.2019.8731097

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abstract = "A new process using a Co-N catalyst has been developed to perform doping simultaneously with film formation in solid phase deposition method (SPD) which does not require transfer of multilayer graphene (MLG). Nitrogen doping into MLG was confirmed by XPS and UPS and succeeded in reducing sheet resistance by about 36%.",

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