Synthesis of Ti-Al-Si-N nanocomposite films using liquid injection PECVD from alkoxide precursors

Engineering & Materials Science

• Nanocomposite films 100%
• Plasma enhanced chemical vapor deposition 87%
• Nitrides 44%
• Liquids 41%
• Nanocrystals 18%
• Composite films 17%
• Thermooxidation 16%
• Oxidation resistance 15%
• Nanostructures 15%
• X ray photoelectron spectroscopy 15%
• Crystalline materials 12%
• Thermodynamic stability 12%
• Transmission electron microscopy 12%
• X ray diffraction 12%
• Scanning electron microscopy 9%
• Microstructure 8%
• Chemical analysis 8%
• Composite materials 7%
• Air 6%

Chemical Compounds

• Nanocomposite 40%
• Liquid 33%
• Liquid Film 29%
• Nitride 25%
• Amorphous Material 18%
• Plasma Enhanced Chemical Vapour Deposition 10%
• Thermooxidation 10%
• Deposition Technique 9%
• Composite Material 8%
• Nanocrystal 7%
• Chemical Element 6%
• X-Ray Photoelectron Spectroscopy 6%
• Microstructure 5%
• Thermal Stability 5%
• Transmission Electron Microscopy 5%
• Resistance 5%
• Nanomaterial 5%
• Scanning Electron Microscopy 5%
• X-Ray Diffraction 4%