TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

M. Takeguchi; M. Shimojo; M. Tanaka; K. Mitsuishi; K. Furuya

doi:10.1109/IMNC.2007.4456161

TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

M. Takeguchi, M. Shimojo, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	176-177
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456161
Publication status	Published - 2007 Dec 1
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country	Japan
City	Kyoto
Period	07/11/5 → 07/11/8

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2007.4456161

Cite this

Takeguchi, M., Shimojo, M., Tanaka, M., Mitsuishi, K., & Furuya, K. (2007). TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 176-177). [4456161] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456161

TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. / Takeguchi, M.; Shimojo, M.; Tanaka, M.; Mitsuishi, K.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 176-177 4456161 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takeguchi, M, Shimojo, M, Tanaka, M, Mitsuishi, K & Furuya, K 2007, TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456161, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 176-177, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07/11/5. https://doi.org/10.1109/IMNC.2007.4456161

Takeguchi M, Shimojo M, Tanaka M, Mitsuishi K, Furuya K. TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 176-177. 4456161. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456161

Takeguchi, M. ; Shimojo, M. ; Tanaka, M. ; Mitsuishi, K. ; Furuya, K. / TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 176-177 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{d1ffce20f17d4e03b4e36a4013b9f21e,

title = "TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors",

author = "M. Takeguchi and M. Shimojo and M. Tanaka and K. Mitsuishi and K. Furuya",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/IMNC.2007.4456161",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "176--177",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

TY - GEN

T1 - TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

AU - Takeguchi, M.

AU - Shimojo, M.

AU - Tanaka, M.

AU - Mitsuishi, K.

AU - Furuya, K.

PY - 2007/12/1

Y1 - 2007/12/1

UR - http://www.scopus.com/inward/record.url?scp=47349118777&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=47349118777&partnerID=8YFLogxK

U2 - 10.1109/IMNC.2007.4456161

DO - 10.1109/IMNC.2007.4456161

M3 - Conference contribution

AN - SCOPUS:47349118777

SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 176

EP - 177

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -