TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

M. Takeguchi; Masayuki Shimojo; M. Tanaka; K. Mitsuishi; K. Furuya

doi:10.1109/IMNC.2007.4456161

TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

M. Takeguchi, Masayuki Shimojo, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	176-177
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456161
Publication status	Published - 2007
Externally published	Yes
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto Duration: 2007 Nov 5 → 2007 Nov 8

Other

Other	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
City	Kyoto
Period	07/11/5 → 07/11/8

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Cite this

Takeguchi, M., Shimojo, M., Tanaka, M., Mitsuishi, K., & Furuya, K. (2007). TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 176-177). [4456161] https://doi.org/10.1109/IMNC.2007.4456161

TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. / Takeguchi, M.; Shimojo, Masayuki; Tanaka, M.; Mitsuishi, K.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 176-177 4456161.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takeguchi, M, Shimojo, M, Tanaka, M, Mitsuishi, K & Furuya, K 2007, TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456161, pp. 176-177, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, 07/11/5. https://doi.org/10.1109/IMNC.2007.4456161

Takeguchi M, Shimojo M, Tanaka M, Mitsuishi K, Furuya K. TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 176-177. 4456161 https://doi.org/10.1109/IMNC.2007.4456161

Takeguchi, M. ; Shimojo, Masayuki ; Tanaka, M. ; Mitsuishi, K. ; Furuya, K. / TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 176-177

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BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

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Access to Document

10.1109/IMNC.2007.4456161