TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

M. Takeguchi, Masayuki Shimojo, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages176-177
Number of pages2
DOIs
Publication statusPublished - 2007
Externally publishedYes
Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto
Duration: 2007 Nov 52007 Nov 8

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
CityKyoto
Period07/11/507/11/8

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Electron beams
Nanostructures
Transmission electron microscopy
Microstructure
Metals
Chemical analysis

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Takeguchi, M., Shimojo, M., Tanaka, M., Mitsuishi, K., & Furuya, K. (2007). TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 176-177). [4456161] https://doi.org/10.1109/IMNC.2007.4456161

TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. / Takeguchi, M.; Shimojo, Masayuki; Tanaka, M.; Mitsuishi, K.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 176-177 4456161.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takeguchi, M, Shimojo, M, Tanaka, M, Mitsuishi, K & Furuya, K 2007, TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456161, pp. 176-177, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, 07/11/5. https://doi.org/10.1109/IMNC.2007.4456161
Takeguchi M, Shimojo M, Tanaka M, Mitsuishi K, Furuya K. TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 176-177. 4456161 https://doi.org/10.1109/IMNC.2007.4456161
Takeguchi, M. ; Shimojo, Masayuki ; Tanaka, M. ; Mitsuishi, K. ; Furuya, K. / TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 176-177
@inproceedings{d1ffce20f17d4e03b4e36a4013b9f21e,
title = "TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors",
author = "M. Takeguchi and Masayuki Shimojo and M. Tanaka and K. Mitsuishi and K. Furuya",
year = "2007",
doi = "10.1109/IMNC.2007.4456161",
language = "English",
isbn = "4990247248",
pages = "176--177",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

}

TY - GEN

T1 - TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

AU - Takeguchi, M.

AU - Shimojo, Masayuki

AU - Tanaka, M.

AU - Mitsuishi, K.

AU - Furuya, K.

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=47349118777&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=47349118777&partnerID=8YFLogxK

U2 - 10.1109/IMNC.2007.4456161

DO - 10.1109/IMNC.2007.4456161

M3 - Conference contribution

SN - 4990247248

SN - 9784990247249

SP - 176

EP - 177

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

ER -