| Original language | English |
|---|---|
| Title of host publication | Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC |
| Pages | 176-177 |
| Number of pages | 2 |
| DOIs | |
| Publication status | Published - 2007 |
| Externally published | Yes |
| Event | s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto Duration: 2007 Nov 5 → 2007 Nov 8 |
Other
| Other | s20th International Microprocesses and Nanotechnology Conference, MNC 2007 |
|---|---|
| City | Kyoto |
| Period | 07/11/5 → 07/11/8 |
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ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
Cite this
TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. / Takeguchi, M.; Shimojo, Masayuki; Tanaka, M.; Mitsuishi, K.; Furuya, K.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 176-177 4456161.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors
AU - Takeguchi, M.
AU - Shimojo, Masayuki
AU - Tanaka, M.
AU - Mitsuishi, K.
AU - Furuya, K.
PY - 2007
Y1 - 2007
UR - http://www.scopus.com/inward/record.url?scp=47349118777&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=47349118777&partnerID=8YFLogxK
U2 - 10.1109/IMNC.2007.4456161
DO - 10.1109/IMNC.2007.4456161
M3 - Conference contribution
SN - 4990247248
SN - 9784990247249
SP - 176
EP - 177
BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
ER -