@inproceedings{d1ffce20f17d4e03b4e36a4013b9f21e,
title = "TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors",
author = "M. Takeguchi and M. Shimojo and M. Tanaka and K. Mitsuishi and K. Furuya",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/IMNC.2007.4456161",
language = "English",
isbn = "4990247248",
series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
pages = "176--177",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",
}