TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

M. Takeguchi, M. Shimojo, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages176-177
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
Duration: 2007 Nov 52007 Nov 8

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conferences20th International Microprocesses and Nanotechnology Conference, MNC 2007
CountryJapan
CityKyoto
Period07/11/507/11/8

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Takeguchi, M., Shimojo, M., Tanaka, M., Mitsuishi, K., & Furuya, K. (2007). TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 176-177). [4456161] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456161