TEM sample preparation using a new nanofabrication technique combining electron-beam-induced deposition and low-energy ion milling

Kazutaka Mitsuishi, Masayuki Shimojo, Miyoko Tanaka, Masaki Takeguchi, Minghui Song, Kazuo Furuya

Research output: Contribution to journalArticle

2 Citations (Scopus)


A new TEM sample preparation technique using electron-beam-induced deposition combined with low-energy ion milling was used to fabricate for two different shapes of sample, conical and plate. High-quality HREM images can be obtained from samples prepared by this technique. A desired sample position can be obtained with high accuracy, and the total sample preparation time can be much less than conventional techniques. Because the gas deposition system used can easily be integrated in a conventional SEM, the method can be performed in any laboratory equipped with a SEM and an ion milling machine.

Original languageEnglish
Pages (from-to)545-548
Number of pages4
JournalMicroscopy and Microanalysis
Issue number6
Publication statusPublished - 2006 Dec 1



  • Electron-beam-induced deposition
  • Ion-beam milling
  • Nanofabrication
  • TEM sample preparations

ASJC Scopus subject areas

  • Instrumentation

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