TEM sample preparation using a new nanofabrication technique combining electron beam induced deposition and low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi, M. Song, K. Furuya

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)545-548
JournalMicrosc. Microanal
Volume12
Publication statusPublished - 2006 Jan 1

Cite this

TEM sample preparation using a new nanofabrication technique combining electron beam induced deposition and low energy ion milling. / Mitsuishi, K.; Shimojo, M.; Tanaka, M.; Takeguchi, M.; Song, M.; Furuya, K.

In: Microsc. Microanal, Vol. 12, 01.01.2006, p. 545-548.

Research output: Contribution to journalArticle

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AU - Furuya, K.

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