TEM sample preparation using a new nanofabrication technique combining electron beam induced deposition and low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi, M. Song, K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{c7c769123cc24decbb719f061ac9e00c,

title = "TEM sample preparation using a new nanofabrication technique combining electron beam induced deposition and low energy ion milling",

author = "K. Mitsuishi and M. Shimojo and M. Tanaka and M. Takeguchi and M. Song and K. Furuya",

year = "2006",

month = jan,

day = "1",

language = "English",

volume = "12",

pages = "545--548",

journal = "Microsc. Microanal",

}