The design and experiment of ion generator power supply for vacuum sputtering

Wen Guang Chen, Yi Hua Rao, Chang Hong Shan, Goro Fujita, Takemoto Yasutoshi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

A LCLC series-parallel high-frequency ac/ac resonant inverter configure for ion assistant vacuum-sputtering manufacture film is proposed. The characteristic of the sputtering chamber and a simplified steady-state analysis of the inverter, using complex circuit analysis, are presented. The control implementation circuit block diagram is introduced to the resonant inverter, which can implement the output current regulation and variable frequency operation simultaneity; the system stability benefits from this control method. It is suitable for the characteristic of chamber load, and the switching losses to be lower as much as possible in such large dynamic load. The 15 kW-30A prototype power supply is described, and experimental results are given.

Original languageEnglish
Title of host publicationFourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings
Pages931-935
Number of pages5
DOIs
Publication statusPublished - 2007
Event4th Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Nagoya
Duration: 2007 Apr 22007 Apr 5

Other

Other4th Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007
CityNagoya
Period07/4/207/4/5

Fingerprint

Sputtering
Vacuum
Ions
Dynamic loads
Electric network analysis
System stability
Experiments
Networks (circuits)

Keywords

  • Ion assistant sputtering
  • Phase-shift PWM
  • Resonant inverter
  • Soft switching

ASJC Scopus subject areas

  • Energy(all)
  • Electrical and Electronic Engineering

Cite this

Chen, W. G., Rao, Y. H., Shan, C. H., Fujita, G., & Yasutoshi, T. (2007). The design and experiment of ion generator power supply for vacuum sputtering. In Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings (pp. 931-935). [4239268] https://doi.org/10.1109/PCCON.2007.373078

The design and experiment of ion generator power supply for vacuum sputtering. / Chen, Wen Guang; Rao, Yi Hua; Shan, Chang Hong; Fujita, Goro; Yasutoshi, Takemoto.

Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings. 2007. p. 931-935 4239268.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, WG, Rao, YH, Shan, CH, Fujita, G & Yasutoshi, T 2007, The design and experiment of ion generator power supply for vacuum sputtering. in Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings., 4239268, pp. 931-935, 4th Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007, Nagoya, 07/4/2. https://doi.org/10.1109/PCCON.2007.373078
Chen WG, Rao YH, Shan CH, Fujita G, Yasutoshi T. The design and experiment of ion generator power supply for vacuum sputtering. In Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings. 2007. p. 931-935. 4239268 https://doi.org/10.1109/PCCON.2007.373078
Chen, Wen Guang ; Rao, Yi Hua ; Shan, Chang Hong ; Fujita, Goro ; Yasutoshi, Takemoto. / The design and experiment of ion generator power supply for vacuum sputtering. Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings. 2007. pp. 931-935
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