The design and experiment of ion generator power supply for vacuum sputtering

Wen Guang Chen, Yi Hua Rao, Chang Hong Shan, Goro Fujita, Takemoto Yasutoshi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

A LCLC series-parallel high-frequency ac/ac resonant inverter configure for ion assistant vacuum-sputtering manufacture film is proposed. The characteristic of the sputtering chamber and a simplified steady-state analysis of the inverter, using complex circuit analysis, are presented. The control implementation circuit block diagram is introduced to the resonant inverter, which can implement the output current regulation and variable frequency operation simultaneity; the system stability benefits from this control method. It is suitable for the characteristic of chamber load, and the switching losses to be lower as much as possible in such large dynamic load. The 15 kW-30A prototype power supply is described, and experimental results are given.

Original languageEnglish
Title of host publicationFourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings
Pages931-935
Number of pages5
DOIs
Publication statusPublished - 2007 Oct 1
Event4th Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Nagoya, Japan
Duration: 2007 Apr 22007 Apr 5

Publication series

NameFourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings

Conference

Conference4th Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007
CountryJapan
CityNagoya
Period07/4/207/4/5

Keywords

  • Ion assistant sputtering
  • Phase-shift PWM
  • Resonant inverter
  • Soft switching

ASJC Scopus subject areas

  • Energy(all)
  • Electrical and Electronic Engineering

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    Chen, W. G., Rao, Y. H., Shan, C. H., Fujita, G., & Yasutoshi, T. (2007). The design and experiment of ion generator power supply for vacuum sputtering. In Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings (pp. 931-935). [4239268] (Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings). https://doi.org/10.1109/PCCON.2007.373078