The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure

T.Nabatame T.Nabatame, K.Segawa K.Segawa, M.Kadoshima M.Kadoshima, H.Tanabe H.Tanabe, K.Iwamoto K.Iwamoto, S.Kimura S.Kimura, Y.Nunoshige Y.Nunoshige, H.Satake H.Satake, A.Toriumi A.Toriumi, T. Ohishi, Tomoji Oishi

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
Journal2006 European Materials Research Society Spring Meeting (Nice,France)
Publication statusPublished - 2006 Jun 10

Cite this

The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure. / T.Nabatame, T.Nabatame; K.Segawa, K.Segawa; M.Kadoshima, M.Kadoshima; H.Tanabe, H.Tanabe; K.Iwamoto, K.Iwamoto; S.Kimura, S.Kimura; Y.Nunoshige, Y.Nunoshige; H.Satake, H.Satake; A.Toriumi, A.Toriumi; Ohishi, T.; Oishi, Tomoji.

In: 2006 European Materials Research Society Spring Meeting (Nice,France), 10.06.2006.

Research output: Contribution to journalArticle

T.Nabatame, TN, K.Segawa, KS, M.Kadoshima, MK, H.Tanabe, HT, K.Iwamoto, KI, S.Kimura, SK, Y.Nunoshige, YN, H.Satake, HS, A.Toriumi, AT, Ohishi, T & Oishi, T 2006, 'The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure', 2006 European Materials Research Society Spring Meeting (Nice,France).
T.Nabatame, T.Nabatame ; K.Segawa, K.Segawa ; M.Kadoshima, M.Kadoshima ; H.Tanabe, H.Tanabe ; K.Iwamoto, K.Iwamoto ; S.Kimura, S.Kimura ; Y.Nunoshige, Y.Nunoshige ; H.Satake, H.Satake ; A.Toriumi, A.Toriumi ; Ohishi, T. ; Oishi, Tomoji. / The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure. In: 2006 European Materials Research Society Spring Meeting (Nice,France). 2006.
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author = "T.Nabatame T.Nabatame and K.Segawa K.Segawa and M.Kadoshima M.Kadoshima and H.Tanabe H.Tanabe and K.Iwamoto K.Iwamoto and S.Kimura S.Kimura and Y.Nunoshige Y.Nunoshige and H.Satake H.Satake and A.Toriumi A.Toriumi and T. Ohishi and Tomoji Oishi",
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AU - T.Nabatame, T.Nabatame

AU - K.Segawa, K.Segawa

AU - M.Kadoshima, M.Kadoshima

AU - H.Tanabe, H.Tanabe

AU - K.Iwamoto, K.Iwamoto

AU - S.Kimura, S.Kimura

AU - Y.Nunoshige, Y.Nunoshige

AU - H.Satake, H.Satake

AU - A.Toriumi, A.Toriumi

AU - Ohishi, T.

AU - Oishi, Tomoji

PY - 2006/6/10

Y1 - 2006/6/10

M3 - Article

JO - 2006 European Materials Research Society Spring Meeting (Nice,France)

JF - 2006 European Materials Research Society Spring Meeting (Nice,France)

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