The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure

T.Nabatame T.Nabatame; K.Segawa K.Segawa; M.Kadoshima M.Kadoshima; H.Tanabe H.Tanabe; K.Iwamoto K.Iwamoto; S.Kimura S.Kimura; Y.Nunoshige Y.Nunoshige; H.Satake H.Satake; A.Toriumi A.Toriumi; T. Ohishi; Tomoji Oishi

The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure

T.Nabatame T.Nabatame, K.Segawa K.Segawa, M.Kadoshima M.Kadoshima, H.Tanabe H.Tanabe, K.Iwamoto K.Iwamoto, S.Kimura S.Kimura, Y.Nunoshige Y.Nunoshige, H.Satake H.Satake, A.Toriumi A.Toriumi, T. Ohishi, Tomoji Oishi

Regional Environment Systems

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Original language	English
Journal	2006 European Materials Research Society Spring Meeting (Nice,France)
Publication status	Published - 2006 Jun 10

Cite this

@article{1231a44e71b04f44b43df7cb05c9a4e5,

title = "The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure",

author = "T.Nabatame T.Nabatame and K.Segawa K.Segawa and M.Kadoshima M.Kadoshima and H.Tanabe H.Tanabe and K.Iwamoto K.Iwamoto and S.Kimura S.Kimura and Y.Nunoshige Y.Nunoshige and H.Satake H.Satake and A.Toriumi A.Toriumi and T. Ohishi and Tomoji Oishi",

year = "2006",

month = jun,

day = "10",

language = "English",

journal = "2006 European Materials Research Society Spring Meeting (Nice,France)",

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TY - JOUR

T1 - The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure

AU - T.Nabatame, T.Nabatame

AU - K.Segawa, K.Segawa

AU - M.Kadoshima, M.Kadoshima

AU - H.Tanabe, H.Tanabe

AU - K.Iwamoto, K.Iwamoto

AU - S.Kimura, S.Kimura

AU - Y.Nunoshige, Y.Nunoshige

AU - H.Satake, H.Satake

AU - A.Toriumi, A.Toriumi

AU - Ohishi, T.

AU - Oishi, Tomoji

PY - 2006/6/10

Y1 - 2006/6/10

M3 - Article

JO - 2006 European Materials Research Society Spring Meeting (Nice,France)

JF - 2006 European Materials Research Society Spring Meeting (Nice,France)

ER -