The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

D. Kaewdook; A. Takasaki; T. Okabe

The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

D. Kaewdook, A. Takasaki, T. Okabe

Regional Environment Systems

Research output: Contribution to journal › Article

Original language	English
Journal	Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand
Publication status	Published - 2011 Oct 1

Cite this

Kaewdook, D., Takasaki, A., & Okabe, T. (2011). The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target. Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand.

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