The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

D. Kaewdook; A. Takasaki; T. Okabe

The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

D. Kaewdook, A. Takasaki, T. Okabe

Regional Environment Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand
Publication status	Published - 2011 Oct 1

Cite this

The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target. / Kaewdook, D.; Takasaki, A.; Okabe, T.

In: Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand, 01.10.2011.

Research output: Contribution to journal › Article › peer-review

@article{1a4f30343cb94051b4accc17ad9cc32a,

title = "The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target",

author = "D. Kaewdook and A. Takasaki and T. Okabe",

year = "2011",

month = oct,

day = "1",

language = "English",

journal = "Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand",

}

TY - JOUR

T1 - The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

AU - Kaewdook, D.

AU - Takasaki, A.

AU - Okabe, T.

PY - 2011/10/1

Y1 - 2011/10/1

M3 - Article

JO - Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand

JF - Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand

ER -