The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

D. Kaewdook, A. Takasaki, T. Okabe

Research output: Contribution to journalArticle

Original languageEnglish
JournalProc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand
Publication statusPublished - 2011 Oct 1

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