The effect of the accelerating voltage in the size of deposit in electron-beam-induced deposition

K. Mitsuishi, Z. Q. Liu, M. Shimojo, M. Tanaka., K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{92be4973562e47f68421ffea1e60041a,

title = "The effect of the accelerating voltage in the size of deposit in electron-beam-induced deposition",

author = "K. Mitsuishi and Liu, {Z. Q.} and M. Shimojo and M. Tanaka. and K. Furuya",

year = "2004",

month = jun,

day = "1",

language = "English",

pages = "401",

journal = "Default journal",

}