The Influence of Ta underlayers on the structure of TiO 2 thin films deposited on an unheated glass substrate

Masao Kamiko, Kazuaki Aotani, Ryo Suenaga, Jung Woo Koo, Kenji Nose, Kentaro Kyuno, Jae Geun Ha

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The influence of Ta underlayers on the structures of TiO 2 thin films grown onto unheated glass substrates by radio frequency magnetron sputtering has been studied and compared. The crystal, electronic, and surface structures of fabricated TiO 2 films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy, respectively. The X-ray diffraction results and valence band spectra by X-ray photoelectron spectroscopy revealed that the fabricated TiO 2 films on the unheated glass substrate with a highly crystallized β-Ta underlayer showed an anatase structure, whereas the TiO 2 film grown directly onto glass or onto a poorly crystallized Ta film showed an amorphous one. The results showed that the crystallized anatase TiO 2 films were successfully obtained on glass substrates using the Ta underlayers without substrate heating and additional annealing.

Original languageEnglish
Pages (from-to)8764-8768
Number of pages5
JournalApplied Surface Science
Volume258
Issue number22
DOIs
Publication statusPublished - 2012 Sep 1

Fingerprint

Glass
Thin films
Substrates
Titanium dioxide
X ray photoelectron spectroscopy
X ray diffraction
Valence bands
Surface structure
Magnetron sputtering
Electronic structure
Atomic force microscopy
Crystal structure
Annealing
Heating
titanium dioxide

Keywords

  • Crystallization
  • Sputtering processes
  • Tantalum
  • Thin film structure
  • Titanium dioxides

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

The Influence of Ta underlayers on the structure of TiO 2 thin films deposited on an unheated glass substrate. / Kamiko, Masao; Aotani, Kazuaki; Suenaga, Ryo; Koo, Jung Woo; Nose, Kenji; Kyuno, Kentaro; Ha, Jae Geun.

In: Applied Surface Science, Vol. 258, No. 22, 01.09.2012, p. 8764-8768.

Research output: Contribution to journalArticle

Kamiko, Masao ; Aotani, Kazuaki ; Suenaga, Ryo ; Koo, Jung Woo ; Nose, Kenji ; Kyuno, Kentaro ; Ha, Jae Geun. / The Influence of Ta underlayers on the structure of TiO 2 thin films deposited on an unheated glass substrate. In: Applied Surface Science. 2012 ; Vol. 258, No. 22. pp. 8764-8768.
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