Abstract
The influence of Ta underlayers on the structures of TiO 2 thin films grown onto unheated glass substrates by radio frequency magnetron sputtering has been studied and compared. The crystal, electronic, and surface structures of fabricated TiO 2 films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy, respectively. The X-ray diffraction results and valence band spectra by X-ray photoelectron spectroscopy revealed that the fabricated TiO 2 films on the unheated glass substrate with a highly crystallized β-Ta underlayer showed an anatase structure, whereas the TiO 2 film grown directly onto glass or onto a poorly crystallized Ta film showed an amorphous one. The results showed that the crystallized anatase TiO 2 films were successfully obtained on glass substrates using the Ta underlayers without substrate heating and additional annealing.
| Original language | English |
|---|---|
| Pages (from-to) | 8764-8768 |
| Number of pages | 5 |
| Journal | Applied Surface Science |
| Volume | 258 |
| Issue number | 22 |
| DOIs | |
| Publication status | Published - 2012 Sep 1 |
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Keywords
- Crystallization
- Sputtering processes
- Tantalum
- Thin film structure
- Titanium dioxides
ASJC Scopus subject areas
- Surfaces, Coatings and Films
Cite this
The Influence of Ta underlayers on the structure of TiO 2 thin films deposited on an unheated glass substrate. / Kamiko, Masao; Aotani, Kazuaki; Suenaga, Ryo; Koo, Jung Woo; Nose, Kenji; Kyuno, Kentaro; Ha, Jae Geun.
In: Applied Surface Science, Vol. 258, No. 22, 01.09.2012, p. 8764-8768.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - The Influence of Ta underlayers on the structure of TiO 2 thin films deposited on an unheated glass substrate
AU - Kamiko, Masao
AU - Aotani, Kazuaki
AU - Suenaga, Ryo
AU - Koo, Jung Woo
AU - Nose, Kenji
AU - Kyuno, Kentaro
AU - Ha, Jae Geun
PY - 2012/9/1
Y1 - 2012/9/1
N2 - The influence of Ta underlayers on the structures of TiO 2 thin films grown onto unheated glass substrates by radio frequency magnetron sputtering has been studied and compared. The crystal, electronic, and surface structures of fabricated TiO 2 films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy, respectively. The X-ray diffraction results and valence band spectra by X-ray photoelectron spectroscopy revealed that the fabricated TiO 2 films on the unheated glass substrate with a highly crystallized β-Ta underlayer showed an anatase structure, whereas the TiO 2 film grown directly onto glass or onto a poorly crystallized Ta film showed an amorphous one. The results showed that the crystallized anatase TiO 2 films were successfully obtained on glass substrates using the Ta underlayers without substrate heating and additional annealing.
AB - The influence of Ta underlayers on the structures of TiO 2 thin films grown onto unheated glass substrates by radio frequency magnetron sputtering has been studied and compared. The crystal, electronic, and surface structures of fabricated TiO 2 films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy, respectively. The X-ray diffraction results and valence band spectra by X-ray photoelectron spectroscopy revealed that the fabricated TiO 2 films on the unheated glass substrate with a highly crystallized β-Ta underlayer showed an anatase structure, whereas the TiO 2 film grown directly onto glass or onto a poorly crystallized Ta film showed an amorphous one. The results showed that the crystallized anatase TiO 2 films were successfully obtained on glass substrates using the Ta underlayers without substrate heating and additional annealing.
KW - Crystallization
KW - Sputtering processes
KW - Tantalum
KW - Thin film structure
KW - Titanium dioxides
UR - http://www.scopus.com/inward/record.url?scp=84863522429&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84863522429&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2012.05.088
DO - 10.1016/j.apsusc.2012.05.088
M3 - Article
AN - SCOPUS:84863522429
VL - 258
SP - 8764
EP - 8768
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - 22
ER -