The Influence of Ta underlayers on the structure of TiO 2 thin films deposited on an unheated glass substrate

Masao Kamiko, Kazuaki Aotani, Ryo Suenaga, Jung Woo Koo, Kenji Nose, Kentaro Kyuno, Jae Geun Ha

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


The influence of Ta underlayers on the structures of TiO 2 thin films grown onto unheated glass substrates by radio frequency magnetron sputtering has been studied and compared. The crystal, electronic, and surface structures of fabricated TiO 2 films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy, respectively. The X-ray diffraction results and valence band spectra by X-ray photoelectron spectroscopy revealed that the fabricated TiO 2 films on the unheated glass substrate with a highly crystallized β-Ta underlayer showed an anatase structure, whereas the TiO 2 film grown directly onto glass or onto a poorly crystallized Ta film showed an amorphous one. The results showed that the crystallized anatase TiO 2 films were successfully obtained on glass substrates using the Ta underlayers without substrate heating and additional annealing.

Original languageEnglish
Pages (from-to)8764-8768
Number of pages5
JournalApplied Surface Science
Issue number22
Publication statusPublished - 2012 Sep 1


  • Crystallization
  • Sputtering processes
  • Tantalum
  • Thin film structure
  • Titanium dioxides

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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