The optimized SMA micro pump chip applicable to liquids and gases

K.Ikuta K.Ikuta, T.Hasegawa T.Hasegawa, Takao Adachi, Tadahiro Hasegawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)916-919
JournalThe 11th International Conference on Solid-State Sensors and Actuators
Publication statusPublished - 2001 Jun 1

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