The optimized SMA micro pump chip applicable to liquids and gases

K.Ikuta K.Ikuta, T.Hasegawa T.Hasegawa, Takao Adachi, Tadahiro Hasegawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)916-919
JournalThe 11th International Conference on Solid-State Sensors and Actuators
Publication statusPublished - 2001 Jun 1

Cite this

The optimized SMA micro pump chip applicable to liquids and gases. / K.Ikuta, K.Ikuta; T.Hasegawa, T.Hasegawa; Adachi, Takao; Hasegawa, Tadahiro.

In: The 11th International Conference on Solid-State Sensors and Actuators, 01.06.2001, p. 916-919.

Research output: Contribution to journalArticle

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