We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.
|Number of pages||4|
|Journal||Applied Physics A: Materials Science and Processing|
|Publication status||Published - 2004 Mar 1|
ASJC Scopus subject areas
- Materials Science(all)