The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

M. Tanaka, Masayuki Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.

Original languageEnglish
Pages (from-to)543-546
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume78
Issue number4
DOIs
Publication statusPublished - 2004 Mar
Externally publishedYes

Fingerprint

Ultrahigh vacuum
Partial pressure
partial pressure
Electron beams
Electron microscopes
Gases
Metals
Particle size
Irradiation
electron beams
ultrahigh vacuum
electron microscopes
irradiation
gases
metals

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor. / Tanaka, M.; Shimojo, Masayuki; Mitsuishi, K.; Furuya, K.

In: Applied Physics A: Materials Science and Processing, Vol. 78, No. 4, 03.2004, p. 543-546.

Research output: Contribution to journalArticle

@article{b0c91b8209e14a1b8d70c0a15e74c9e4,
title = "The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor",
abstract = "We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.",
author = "M. Tanaka and Masayuki Shimojo and K. Mitsuishi and K. Furuya",
year = "2004",
month = "3",
doi = "10.1007/s00339-003-2394-z",
language = "English",
volume = "78",
pages = "543--546",
journal = "Applied Physics",
issn = "0340-3793",
publisher = "Springer Heidelberg",
number = "4",

}

TY - JOUR

T1 - The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

AU - Tanaka, M.

AU - Shimojo, Masayuki

AU - Mitsuishi, K.

AU - Furuya, K.

PY - 2004/3

Y1 - 2004/3

N2 - We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.

AB - We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.

UR - http://www.scopus.com/inward/record.url?scp=1242352493&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1242352493&partnerID=8YFLogxK

U2 - 10.1007/s00339-003-2394-z

DO - 10.1007/s00339-003-2394-z

M3 - Article

VL - 78

SP - 543

EP - 546

JO - Applied Physics

JF - Applied Physics

SN - 0340-3793

IS - 4

ER -