The size dependence of the nano-dots formed by electron beam induced deposition on the partial pressure of the precursor

M. Tanaka, M. Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{6ec79ebb44d2430e8d07e03dcc608d93,

title = "The size dependence of the nano-dots formed by electron beam induced deposition on the partial pressure of the precursor",

author = "M. Tanaka and M. Shimojo and K. Mitsuishi and K. Furuya",

year = "2004",

month = jan,

day = "1",

language = "English",

volume = "A",

pages = "543--546",

journal = "Applied Physics A",

}