The size dependence of the nano-dots formed by electron beam induced deposition on the partial pressure of the precursor

M. Tanaka, M. Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

53 Citations (Scopus)
Original languageEnglish
Pages (from-to)543-546
JournalApplied Physics A
VolumeA
Publication statusPublished - 2004 Jan 1

Cite this