The size dependence of the nano-dots formed by electron beam induced deposition on the partial pressure of the precursor

M. Tanaka, M. Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

53 Citations (Scopus)
Original languageEnglish
Pages (from-to)543-546
JournalApplied Physics A
VolumeA
Publication statusPublished - 2004 Jan 1

Cite this

The size dependence of the nano-dots formed by electron beam induced deposition on the partial pressure of the precursor. / Tanaka, M.; Shimojo, M.; Mitsuishi, K.; Furuya, K.

In: Applied Physics A, Vol. A, 01.01.2004, p. 543-546.

Research output: Contribution to journalArticle

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