Thermal stability of ALD-grown Ru/HfON/Si capacitors

H.Tabata H.Tabata, K.Segawa K.Segawa, M.Kadoshima M.Kadoshima, Y.Nunoshige Y.Nunoshige, A.Ogawa A.Ogawa, T.Nabatame T.Nabatame, H.Satake H.Satake, T.Ohishi T.Ohishi, A.Toroumi A.Toroumi, Tomoji Oishi

Research output: Contribution to journalArticle

Original languageEnglish
Journal6th International Coference on Atomic Layer Deposition (Seoul, Korea)
Publication statusPublished - 2006 Jul 25

Cite this

H.Tabata, H. T., K.Segawa, K. S., M.Kadoshima, M. K., Y.Nunoshige, Y. N., A.Ogawa, A. O., T.Nabatame, T. N., ... Oishi, T. (2006). Thermal stability of ALD-grown Ru/HfON/Si capacitors. 6th International Coference on Atomic Layer Deposition (Seoul, Korea).

Thermal stability of ALD-grown Ru/HfON/Si capacitors. / H.Tabata, H.Tabata; K.Segawa, K.Segawa; M.Kadoshima, M.Kadoshima; Y.Nunoshige, Y.Nunoshige; A.Ogawa, A.Ogawa; T.Nabatame, T.Nabatame; H.Satake, H.Satake; T.Ohishi, T.Ohishi; A.Toroumi, A.Toroumi; Oishi, Tomoji.

In: 6th International Coference on Atomic Layer Deposition (Seoul, Korea), 25.07.2006.

Research output: Contribution to journalArticle

H.Tabata, HT, K.Segawa, KS, M.Kadoshima, MK, Y.Nunoshige, YN, A.Ogawa, AO, T.Nabatame, TN, H.Satake, HS, T.Ohishi, TO, A.Toroumi, AT & Oishi, T 2006, 'Thermal stability of ALD-grown Ru/HfON/Si capacitors', 6th International Coference on Atomic Layer Deposition (Seoul, Korea).
H.Tabata HT, K.Segawa KS, M.Kadoshima MK, Y.Nunoshige YN, A.Ogawa AO, T.Nabatame TN et al. Thermal stability of ALD-grown Ru/HfON/Si capacitors. 6th International Coference on Atomic Layer Deposition (Seoul, Korea). 2006 Jul 25.
H.Tabata, H.Tabata ; K.Segawa, K.Segawa ; M.Kadoshima, M.Kadoshima ; Y.Nunoshige, Y.Nunoshige ; A.Ogawa, A.Ogawa ; T.Nabatame, T.Nabatame ; H.Satake, H.Satake ; T.Ohishi, T.Ohishi ; A.Toroumi, A.Toroumi ; Oishi, Tomoji. / Thermal stability of ALD-grown Ru/HfON/Si capacitors. In: 6th International Coference on Atomic Layer Deposition (Seoul, Korea). 2006.
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AU - Y.Nunoshige, Y.Nunoshige

AU - A.Ogawa, A.Ogawa

AU - T.Nabatame, T.Nabatame

AU - H.Satake, H.Satake

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